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Ceramic pressure measurement cell having at least one temperature transducer and pressure sensor having a pressure measurement cell of this type

A measurement unit, pressure technology, applied in the direction of measuring heat, thermometers, measuring devices, etc., can solve problems such as unfavorable and affect the mechanical stress associated with pressure measurement, and achieve the effect of promoting correction

Active Publication Date: 2018-08-03
EHNDRESS KHAUZER GMBKH KO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This results in temperature gradients and thus associated mechanical stresses that adversely affect pressure measurements

Method used

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  • Ceramic pressure measurement cell having at least one temperature transducer and pressure sensor having a pressure measurement cell of this type
  • Ceramic pressure measurement cell having at least one temperature transducer and pressure sensor having a pressure measurement cell of this type
  • Ceramic pressure measurement cell having at least one temperature transducer and pressure sensor having a pressure measurement cell of this type

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Experimental program
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Embodiment Construction

[0039] Figure 1a and Figure 1b The exemplary embodiment of a pressure measuring cell 1 according to the invention represented in comprises a disc-shaped ceramic measuring diaphragm 2 joined in a pressure-tight manner along an outer circumferential joint 4 to a substantially harder disc-shaped ceramic The opposite body 3 forms a measurement chamber 5 between the opposite body 3 and the measurement diaphragm 2 . The measuring diaphragm 2 and the counter-body consist in particular of corundum. The joint may in particular comprise an active braze, for example a Zr—Ni—Ti active braze.

[0040] The measuring diaphragm 2 has on its opposite body side surface a full-surface diaphragm electrode 7 with a radius R, where R is the radius of the flexible region of the measuring diaphragm, which corresponds to the junction 4 inner diameter. On the diaphragm-side end of the counter body 3 a central measuring electrode 8 is arranged cross-sectionally surrounded by a reference electrode 9...

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Abstract

A pressure measurement cell comprises: a ceramic counter body (3); a ceramic measuring diaphragm (2) which is joined in a pressure-tight manner with the counter body (3), creating a measurement chamber between the counter body (3) and the measuring diaphragm (2), by means of a circumferential joint (4), wherein the measuring diaphragm can be deformed by a pressure to be measured; an electrical converter for converting a pressure-dependent deformation of the measuring diaphragm into an electrical signal; and a temperature transducer for providing at least one electrical signal dependent on a temperature or on a temperature gradient of the pressure measurement cell, characterized in that the temperature transducer comprises at least one first thermocouple having a galvanic contact between afirst conductor with an electrically conductive material (14) and a second conductor with at least one second electrically conductive material.

Description

technical field [0001] The invention relates to a ceramic pressure measuring cell with at least one temperature transducer and to a pressure sensor with such a pressure measuring cell. Background technique [0002] A temperature transducer or temperature sensor is often integrated into the pressure measurement cell in order to compensate for static temperature errors during pressure measurement. In universal pressure measuring cells, this temperature sensor is usually arranged on the rear surface of the ceramic; however, it can also be contained inside the connected evaluation electronics. If the pressure measuring cell is in thermal equilibrium with its surroundings, the temperature dependence of the pressure measurement can be well compensated by such a temperature sensor and appropriate processing of the measurement signal. However, temperature jumps can cause severe measurement errors, which can hardly be compensated using known methods. Especially in ceramic pressure ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00G01L19/02G01L19/04G01K7/04
CPCG01L9/0075G01L19/02G01L19/04G01K7/04G01L19/0092
Inventor 安德烈亚斯·罗斯贝格尼尔斯·波纳特让·施莱费尔伯克托马斯·尤林
Owner EHNDRESS KHAUZER GMBKH KO KG
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