An analytical method and analytical system for nbti degradation prediction under low-frequency AC stress mode
An analytical method and stress technology, applied in analytical systems, in the field of NBTI degradation prediction under low-frequency AC stress mode, can solve the problems of NBTI degradation and complex recovery characteristics, and achieve simple and accurate device reliability, few parameters, and wide applicability. Effect
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[0057] The present invention will be further described in detail in conjunction with the following specific implementation and accompanying drawings. The process, conditions, experimental methods, etc. for implementing the present invention, except for the content specifically mentioned below, are common knowledge and common knowledge in this field, and the present invention has no special limitation content.
[0058] The analysis method provided by the present invention introduces the innovative NBTI low-frequency AC analysis model, based on the traditional RD theory, taking into account the fast capture / release characteristics of electrons and the H 2 Lock-in effect to accurately account for NBTI degradation in low frequency AC stress mode. Analytic method of the present invention comprises the steps:
[0059] Step 1: Obtain the NBTI degradation RD model parameters of the p-MOSFET device.
[0060] Step 2: Based on the basic reaction-diffusion theory and H 2 The lock-in ef...
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