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Irradiation particle energy selection method capable of simultaneously generating ionization and displacement defects

An energy selection and defect technology, applied in circuits, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as inability to effectively select energy to carry out ionization/displacement synergistic effects, and achieve easy operation, wide application prospects, and simple steps. Effect

Active Publication Date: 2018-07-27
HARBIN INST OF TECH
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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that it is impossible to effectively select the appropriate energy to carry out the ionization / displacement synergistic effect. The present invention provides a method based on Monte Carlo (Monte Carlo method) to effectively select the appropriate energy to carry out the ionization / displacement synergistic effect Energy-selective method of irradiated particles for simultaneous generation of ionization and displacement defects

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  • Irradiation particle energy selection method capable of simultaneously generating ionization and displacement defects
  • Irradiation particle energy selection method capable of simultaneously generating ionization and displacement defects
  • Irradiation particle energy selection method capable of simultaneously generating ionization and displacement defects

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Embodiment Construction

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0029] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0030] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0031] Such as figure 1 As shown, a method for selecting energy of irradiated particles that simultaneously pro...

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Abstract

The invention provides an irradiation particle energy selection method capable of simultaneously generating ionization and displacement defects, and belongs to the technical field of space environmental effects, nuclear science and applications. The application objects of the irradiation particle energy selection method include various key materials and devices for spacecrafts. The ionization / displacement absorption dose and range of incident particles per unit injection are calculated under specific material state conditions on the basis of a Monte Carlo calculation method. The energy of theincident particles can be determined according to the proportional relationship between the ionization absorption dose and the displacement absorption dose, so that the condition that stable ionization and displacement defects can be simultaneously generated is ensured.

Description

technical field [0001] The invention relates to an ionization / displacement synergistic effect, belongs to the field of space environment effects, nuclear science and application technology, and in particular relates to a method for selecting energy of irradiated particles that simultaneously generates ionization and displacement defects. Background technique [0002] With the development of human spaceflight, the frequency of use of different types of materials and devices in the space environment is increasing, and the impact of the space environment on key materials and devices used in spacecraft is also becoming more and more prominent. 70 years of human space exploration practice has shown that the space environment is harsh on spacecraft, cannot be ignored, has an extremely important impact, and is an important cause of spacecraft abnormalities and failures. Among them, the impact of space charged particle radiation environment on key materials and devices used in space...

Claims

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Application Information

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IPC IPC(8): H01L21/322
CPCH01L21/322
Inventor 李兴冀杨剑群刘超铭吕钢董尚利
Owner HARBIN INST OF TECH
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