Si-microchannel plate base integral oxidation anti-deformation constraint device
A technology of silicon microchannel plate and restraint device, applied in the direction of microstructure device, manufacturing microstructure device, process for producing decorative surface effects, etc., can solve the problem of damage to silicon microchannel plate array structure and deformation of silicon microchannel plate substrate And other issues
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[0010] The specific scheme of the present invention for the whole silicon microchannel plate substrate oxidation prevention deformation restraint device is as follows.
[0011] Such as figure 1 As shown, two guard plates 1 on the left and right clamp a retaining ring 2, guard plate 1 and retaining ring 2 are made of sapphire crystal, guard plate 1 and retaining ring 2 are disc-shaped, and have the same outer diameter, the outer diameter is 50mm. Air holes 3 are evenly distributed in the middle area of the guard plate 1 , the diameter of the middle area distributed with the air holes 3 is 35 mm, and the thickness of the guard plate 1 is 2.3 mm. When the diameter of the microchannel plate 8 to be oxidized is 25 mm and the thickness is 350 μm, the inner diameter of the retaining ring 2 is 30 mm and the thickness is 380 μm.
[0012] Such as figure 2 As shown, the horizontal card seat 4 is in the shape of a long groove, and a plurality of card slots 5, such as 5, are distribu...
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