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Etching solution composition, wiring, array substrate for display device and manufacturing method thereof

A technology of composition and etching solution, which is applied in the direction of surface etching composition, chemical instruments and methods, instruments, etc., can solve the problems of poor etching straightness and uniformity, and achieve excellent etching straightness and uniform etching excellent effect

Active Publication Date: 2018-07-10
DONGWOO FINE CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, the conventional etchant composition still has the problems of poor etching straightness and uniformity

Method used

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  • Etching solution composition, wiring, array substrate for display device and manufacturing method thereof
  • Etching solution composition, wiring, array substrate for display device and manufacturing method thereof
  • Etching solution composition, wiring, array substrate for display device and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～11 and comparative example 1～15

[0098] Embodiment 1~11 and comparative example 1~15. manufacture of etchant composition

[0099] Etching liquid compositions of Examples 1 to 11 and Comparative Examples 1 to 15 were produced according to the composition and content shown in Table 1 below, and deionized water was included in the balance so that the total weight of the composition became 100% by weight. .

[0100] [Table 1]

[0101] (unit weight%)

[0102]

experiment example 1

[0103] Experimental example 1. Performance evaluation of etching solution composition

[0104] Will be in 100mmX100mm glass (SiO 2 ) on the substrate according to Thickness evaporated Al film, on it according to The substrate on which ITO was vapor-deposited to a thickness was used as a test piece, and a photoresist film was formed on the above-mentioned ITO. Etching was performed at 33° C. using the etching solution compositions of the above Examples and Comparative Examples.

[0105] The etching machine (Etcher) uses a 0.5-generation device that can handle glass size (Glass Size), sprays the etching solution composition at 0.1MPa, and maintains the exhaust pressure in the etching zone (Etching zone) at 20Pa. After etching, use SEM equipment to confirm side etch (side etch, S / E), taper angle (taper angle, T / A), the generation of the upper ITO tip and the damage degree of the lower aluminum film, and the results are shown in the following table 2.

[0106]

[0107] ...

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Abstract

The invention provides an etching solution composition, a wiring, an array substrate for a display device, and a manufacturing method thereof. The etching solution composition comprises nitric acid, phosphoric acid, acetic acid, chlorinated compound, sulfonic acid compound, sulfate compound and water. Relative to total mass of the etching solution composition, the nitric acid accounts for 40-60wt%; phosphoric acid accounts for 5-9wt%; acetic acid accounts for 15-25wt%; chlorinated compound accounts for 0.1-2%; sulfonic acid compound accounts for 0.5-3wt%; sulfate compound accounts for 0.5-3wt%; and the balance of water. The etching solution composition has effects of excellent etching directness and excellent etching uniformity. Furthermore the etching solution composition has an effect ofno sharp end generation in etching a transparent conductive film.

Description

technical field [0001] The present invention relates to an etchant composition, wiring produced from the etchant composition, a method for producing an array substrate for a display device using the etchant composition, and an array substrate for a display device. Background technique [0002] In general, flat panel display devices are divided into passive matrix and active matrix according to their driving method. The active matrix has a circuit using a thin film transistor (Thin Film Transistor; TFT). Such circuits are mainly used in flat panel display devices such as liquid crystal display devices (Liquid Crystal Display; LCD) and organic electroluminescence display devices (Organic Electroluminescence display; OELD). The flat panel display device of the above-mentioned active driving method not only has excellent resolution and video presentation capability, but also is more advantageous for increasing the area of ​​the display device. [0003] In such an active drive t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/20H01L27/12
CPCH01L27/124H01L27/127C23F1/20C23F1/02C09K13/06G06F3/041G06F2203/04103H10K59/40
Inventor 李承洙权玟廷沈庆辅
Owner DONGWOO FINE CHEM CO LTD
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