Time domain heat reflection spectral measurement system

Abstract

The invention provides a time domain heat reflection spectral measurement system. The time domain heat reflection spectral measurement system is characterized in that a polarized pulse laser is incident into a first light-splitting device via a collimating lens after passing through an optical isolation system, and is divided by the first light-splitting device into two laser beams. which are in orthogonal polarization and respectively serve as pump light and detection light; the pump light passes through an electrooptical modulator, is incident into an optical retarder through a section reflecting mirror, is incident into a second light-splitting device via a short-wave pass filter and a third reflecting mirror in sequence, and is reflected by the second light-splitting device; and the detection light is modulated by an optical chopper, then, is reflected by a fourth reflecting mirror, is incident into a long-wave pass filter, is reflected and incident into the second light-splittingdevice via a third light-splitting device, and is merged with the pump light into a laser beam, and the co-linear light is focused onto the surface of a sample through an objective lens. According tothe time domain heat reflection spectral measurement system, non-linear crystals are not used, perfect separation of the pump light from the detection light on a spectrum is realized at a relatively low cost, and the signal-to-noise ratio is greatly increased.

Description

technical field [0001] The invention relates to solid thermal conductivity measurement technology, in particular to a time-domain thermal reflection spectrum measurement device. Background technique [0002] With the development of nanotechnology, the size of devices prepared by modern technology is getting smaller and smaller, and the problem of heat dissipation caused by thermal accumulation is becoming more and more obvious. At the same time, the continuous research and development of new thin film materials also urgently requires accurate characterization of the relevant properties of new materials. Only by accurately characterizing the heat transport properties of materials or microstructures can it be possible to further explore its heat transport mechanism. [0003] The time-domain thermal reflectance spectroscopy measurement system came into being, which is a transient measurement technology based on the pump-probe ultrafast optics detection principle to characteriz...

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Problems solved by technology

However, nonlinear crystals have low optical elimination rate, high cost, and increase the difficulty of optical path calibration, which makes the system structure redundant and the signal-to-noise ratio is not high

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