Optical path transmitting and reversing device and optical performance parameter detection system

Abstract

The invention provides an optical path transmitting and reversing device. The optical path transmitting and reversing device comprises a input light cylinder, a reversing cylinder, an optical bracket,a first output light cylinder, a second output light cylinder, a top plate and a bottom plate, wherein the reversing cylinder is a partially hollow cylinder; the reversing cylinder is fixedly mountedon the bottom plate; the optical bracket is mounted inside the reversing cylinder; a reflector is fixedly mounted on the optical bracket; multiple side plates connected with the input light cylinder,the first output light cylinder and the second output light cylinder respectively are arranged around the reversing cylinder; the top plate is mounted on the top of the reversing cylinder; a turnplate capable of rotating the reversing cylinder is arranged on the top plate; a limiting mechanism is further arranged on the top plate, and the limiting mechanism can limit the optical bracket to be ina first state or a second state different from the first state. The invention further provides an optical performance parameter detection system comprising the optical path transmitting and reversingdevice.

Description

Technical field [0001] The invention relates to the field of laser technology, in particular to an optical path transmission reversing device and an optical performance parameter detection system. Background technique [0002] The lithography machine is mainly composed of projection objective lens, lighting system, mask table, workpiece table, light source and other main components. The light source of projection lithography machine covers a wide range of wavelengths, including ultraviolet g-line, i-line, extreme ultraviolet, deep ultraviolet, and extreme Ultraviolet rays, etc., currently the most widely used on the market is the 193nm (ArF) projection optical lithography machine. The light source module is usually separated from the whole machine, and can be a separate system. The light source to the lithography machine host is usually connected via a certain path of transmission light path. In order to prevent the laser from reacting with the air during the transmission proces...

AI Technical Summary

Problems solved by technology

Usually, the transmission optical path from the laser to the lithography machine or optical detection equipment will be made into a fixed dedicated optical path, that is, one laser is used by one lithography or detection equipment, but when a laser needs to be used alternately by two devices At this time, due to the large volume and mass of these devices, it is inconvenient to carry. At this time, an optical path reversing device is needed, which can switch the laser to different devices according to the use requirements.

This kind of application generally does not appear in the production line of semiconductor factories, but it will appear in equipment research and development and optical inspection. Using a laser will also use more space, gas source, energy and other resources, which will increase the cost

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