Bi-piezoelectric stack driving type precision rotary driving device

Abstract

The invention relates to a bi-piezoelectric stack driving type precision rotary driving device, and belongs to the technical field of precision engineering. The bi-piezoelectric stack driving type precision rotary driving device comprises a support base, a rotary table, a stator assembly, a bearing and the like; the support base and the rotary table are connected through the bearing in a matched manner; the support base and the stator assembly are connected through a bolt; the rotary table and the stator assembly are contacted and matched through the front end of a driving foot; and the bearing, the support base and the rotary table are in interference fit. When an exciting electric signal acts on a stack type piezoelectric component, the stack type piezoelectric component performs axial elongation based on the inverse piezoelectric effect; therefore, the driving foot performs tangential displacement, so that the rotary table is driven to perform rotational motion; and the direction and the time sequence of driving voltage are changed, so that the rotary table can be controlled to perform forward rotation, inverse rotation and positioning stillness. The bi-piezoelectric stack driving type precision rotary driving device disclosed by the invention has the technical advantages of being simple in structure, high in positioning precision, large in stroke, rapid in response speed and the like, and has wide application prospect in the technical field of precision engineering.

Description

technical field [0001] The invention relates to the technical field of precision engineering, in particular to a dual piezoelectric stack driven precision rotary drive device. Background technique [0002] In recent years, with the development of science and technology, micro-nano technology has become more and more important in life sciences, microelectronics, optics, ultra-precision machinery and its manufacturing, precision measurement, medicine and health, semiconductors, biochemistry, data storage and other disciplines. more important position. Micro-mechanical technology, micro-nano measurement technology, and micro-nano-level positioning and driving technology have become hot spots in the high-tech field in the world today. Various new driving devices with functions of precise driving, precise measurement and precise positioning have been successively developed. Existing driving devices often have shortcomings such as large structural size and low positioning accura...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a dual piezoelectric stack driven precision rotary drive device, which solves the technical problems of the existing drive device such as large structural size, low positioning accuracy and small stroke.

Images