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Coating device and coating method

A coating device and coating liquid technology, applied in the field of coating technology, can solve problems such as lack of liquid, insufficient coating liquid, limitation of coating speed and conveying speed, etc.

Pending Publication Date: 2018-03-23
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the coating device with the above structure, since the slit nozzle is fixed, the coating speed is limited by the conveying speed of the substrate.
Therefore, in order to shorten the takt time required for the coating process, for example, it is effective to increase the conveyance speed of the substrate. The supply of the coating liquid from the nozzle may not be sufficient, and the coating liquid may be lacking on the surface of the substrate, making it difficult to apply the coating liquid to the substrate stably.

Method used

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  • Coating device and coating method

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Embodiment Construction

[0034] Figure 1A It is a figure which shows one embodiment of the coating apparatus of this invention, and is a plan view seen from vertically above, and Figure 1B From Figure 1A Top view with applicator disassembled. also, figure 2 is showing control Figure 1A A block diagram of the control mechanism of the coating device shown. In addition, in Figure 1A , Figure 1B And in each figure described later, in order to clarify the arrangement relationship of each part of the device, the conveyance direction of the substrate W is referred to as the "X direction", and the Figure 1A , Figure 1B The horizontal direction from the left-hand side to the right-hand side is called "+X direction", and the opposite direction is called "-X direction". In addition, in the horizontal direction Y perpendicular to the X direction, the front side of the device is referred to as "−Y direction", and the rear side of the device is referred to as "+Y direction". In addition, the upward dir...

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Abstract

The present invention relates to a coating device and a coating method, which shorten the tact time of the coating process and stably apply the coating liquid to the substrate. The coating apparatus includes a floating portion for floating the substrate with the main surface of the substrate facing upward, and a conveying portion for conveying the substrate floated by the floating portion in a predetermined conveyance direction at a substrate conveying speed; a nozzle which sprays the coating liquid onto the main surface of the substrate conveyed by the conveying section to apply the coating liquid; and a moving section moves the nozzle that is ejecting the coating liquid in the conveying direction at a nozzle moving speed that is lower than the substrate conveying speed.

Description

technical field [0001] The present invention relates to a coating technique for applying a coating to the main surface of a substrate while transporting the substrate in a transport direction at a predetermined substrate transport speed in a state where the substrate is floated with its main surface facing upward. liquid. Background technique [0002] In the manufacturing process of electronic components such as semiconductor devices and liquid crystal display devices, a coating device for applying a coating liquid to the surface of a substrate is used. As such a coating device, there is known a device that sprays the substrate from a slit nozzle previously fixed at a predetermined position while conveying the substrate while blowing gas to the back surface of the substrate to float the substrate. The surface (corresponding to the "main surface of the substrate" of the present invention) sprays the coating liquid, thereby coating the coating liquid on almost the entire subs...

Claims

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Application Information

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IPC IPC(8): B05C5/02B05C13/00
CPCB05C5/0254B05C13/00
Inventor 安陪裕滋
Owner DAINIPPON SCREEN MTG CO LTD
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