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Humidity control method in test of humidity-controllable semiconductor gas sensor

A humidity control and gas sensor technology, which is used in humidity control, control input involving air characteristics, and non-electrical variable control, etc., and can solve the problems of long sample gas desorption time and unsuitability for gas testing.

Inactive Publication Date: 2018-03-16
DALIAN NATIONALITIES UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Usually, the static test system adopts a closed large-capacity gas chamber, which injects sample gas and mixes it uniformly in the container to form a certain volume of test gas. The equipment of this test method is relatively simple, but the sample gas on the device in the gas chamber The long desorption time is not suitable for a large number of gas tests

Method used

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  • Humidity control method in test of humidity-controllable semiconductor gas sensor
  • Humidity control method in test of humidity-controllable semiconductor gas sensor
  • Humidity control method in test of humidity-controllable semiconductor gas sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0068] A test method for a humidity-controllable semiconductor gas sensor, comprising: SnO 2 The steps of preparing gas-sensitive materials, the steps of making gas-sensitive elements, the steps of building and testing the semiconductor gas sensor test system, and the steps of analyzing the performance of the semiconductor gas sensor test system and the semiconductor gas-sensitive element.

[0069] The step of setting up and testing the gas sensor testing system has a step of controlling the humidity of the air chamber. In this step, a humidity control system is used, including a main controller, a humidity detection sensor, a dehumidifier, an ultrasonic humidifier and The buzzer, wherein the humidity detection sensor, the dehumidifier and the ultrasonic humidifier are installed in the air chamber, and the main controller is respectively connected with the humidity detection sensor, the dehumidifier, the ultrasonic humidifier and the buzzer.

Embodiment 2

[0071] Have the same technical scheme as embodiment 1, more specifically: SnO 2 The steps of gas-sensitive material preparation are: with SnCl 4 ·5H 2 O as raw material, dilute ammonia water as precipitant, weigh a certain amount of SnCl 4 ·5H 2 O raw material, dissolved in an appropriate amount of deionized water, added a small amount of citric acid, stirred to make it completely dissolved, then heated to boiling, and made to react; the prepared dilute ammonia water was slowly added dropwise to the SnCl 4 When the precipitation is complete, wash with warm water and centrifuge for several times to remove the Cl-, then dry the precipitate at 60-100°C, grind it and put it in the muffle furnace Burn at about 700°C for 2 to 4 hours to obtain SnO 2 gas sensitive material.

Embodiment 3

[0073] It has the same technical solution as that of Embodiment 1 or 2, more specifically: in the step of making the gas sensor, the tube core of the sensitive element has a capillary ceramic tube, and the heating wire penetrates into the ceramic tube, The outer coated metal electrode is used as the signal electrode for measuring the resistance of the element, and the gas sensitive material SnO is coated on the outer metal electrode. 2 , and fired;

[0074]The production steps are as follows: the substrate of the ceramic tube coated with metal electrodes at both ends is ultrasonically cleaned with toluene, alcohol and deionized water in sequence, and after drying under the infrared lamp, the ground slurry is coated on the surface of the ceramic tube. and then sintered in a tube-type resistance furnace. Finally, a heating wire with a suitable resistance value is inserted into the burned tube core, and the electrode lead and the heating wire lead are welded on the tube seat of t...

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Abstract

The invention discloses a humidity control method in the test of a humidity-controllable semiconductor gas sensor, and belongs to the field of element test. The method is used for solving the problemsof incomplete test methods and low humidity control precision of existing formaldehyde gas sensors. The humidity control system comprises a host computer, the host computer has a man-machine interaction interface and is used for man-machine interaction operation and displaying the preset value and the measured value of the humidity, a main controller is a PLC, and the PID adjusting module of thePLC is used to carry out closed loop control on the humidity in a gas chamber. The method achieves complete test of the formaldehyde gas sensor and improves the controllability and the control precision of the humidity.

Description

[0001] This application is a divisional application with application number 201510778949.9, application date November 13, 2015, and invention title "Testing method for semiconductor gas sensor with controllable humidity". technical field [0002] The invention belongs to the field of element testing, in particular to a method for testing a humidity-controllable semiconductor gas sensor. Background technique [0003] When the development of semiconductor gas sensor technology is in full swing, the development of semiconductor gas sensor testing technology has not kept pace with the development of gas sensor technology. Human beings' understanding and transformation of the objective world are often based on testing work. Engineering testing technology is a new technology that uses modern testing methods to detect, test, and analyze various signals in engineering, especially dynamic physical signals that change with time, and extract useful information from them. The results o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12F24F3/14F24F11/63F24F11/30F24F110/20
CPCF24F3/14G01N27/00G01N27/12G01N27/125G05D22/02
Inventor 杜海英孙炎辉王述刚
Owner DALIAN NATIONALITIES UNIVERSITY
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