Micro-resonance electrometer based on bending beams having single free ends and charge detection method

Abstract

The invention discloses a micro-resonance electrometer based on bending beams having single free ends and a charge detection method. A ground electrode, a substrate, a resonator, a drive electrode, asense electrode, an input electrode, and an anchor end are arranged inside the sensor. Two ends of two bending beams arranged at the resonator are connected mutually to form a fixed end and a detection end; the fixed end is connected with the ground electrode; the detection end is connected with the anchor end by a flexible support beam; and the detection end and the input electrode form a flat plate type input capacitor. Two sides of flat electrodes of the bending beams, together with the drive electrode and the sense electrode, forms a drive capacitor and a sense capacitor. According to theinvention, on the basis of the provided novel design of the bending beams with single free ends, the resonator works in an elastic deformation mode and a novel charge sensing mechanism is provided based on the elastic deformation mode, so that the high sensitivity is realized. Moreover, the nonlinearity influence of the resonator is eliminated and the temperature drift coefficient of the frequencyis reduced.

Description

technical field [0001] The invention belongs to the field of sensors in the technical field of micro-electromechanical systems (MEMS), in particular to a micro-resonant electrometer with low nonlinearity and high sensitivity based on a single free-end curved beam. Background technique [0002] Modern Micro-Electro-Mechanical Systems (MEMS) technology provides a way to design sensors based on the micro-nano scale. Microscopic sensors have the advantages of small size, low cost, and low power consumption compared to macroscopic sensors. And it is compatible with the traditional microelectronic circuit integration process, and can realize monolithic integration of the entire sensor and peripheral signal processing circuits. The existing related micro-electrometers are based on the flexible beam resonator [1-2] of the electrostatic double-terminal fixed support, and the axial or lateral force is generated by the electrostatic force induced by the beam for detection. This type ...

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Problems solved by technology

This type of resonator relies on DC and AC voltage to stretch the beam to drive the output resonant frequency, which has obvious frequency nonlinearity and makes the sensor unable to work at the material limit, thus limiting the stability and power handling capacity of the sensor

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