Lamb wave sensor, biological detection chip and rapid screening system
A biological detection and sensor technology, applied in the field of sensors, can solve the problems of cumbersome detection steps, low detection specificity, and high cost of Lamb wave immune sensors, and achieve simplified technical operation steps and equipment requirements, low detection limits, and high detection efficiency Effect
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Embodiment 1
[0089] This embodiment provides a Lamb wave sensor, including a substrate layer 131, at least one detection cavity 1312 with one-way opening is opened on one side of the substrate layer, and the substrate layer at the top of the detection cavity 1312 forms a resonant thin film 1311 A ground electrode layer 132 and a piezoelectric film 133 are sequentially provided along the substrate layer 131 in a direction away from the detection cavity 1312; at least one pair of first microelectrodes 134 are arranged on the piezoelectric film 133 away from the ground electrode layer 132 on one side, used to detect piezoelectric signals; at least one pair of second microelectrodes 135, the surface modified antibodies of the second microelectrodes 135, used to detect impedance signals; the second microelectrodes 135 are arranged on the The lower surface of the resonant film 1311, or the first microelectrode 134 is formed by modifying the antibody.
[0090] In this embodiment, specifically as ...
Embodiment 2
[0108] This embodiment provides a Lamb wave sensor. Compared with the Lamb wave sensor provided in Embodiment 1, the difference is only that: while the second microelectrode 135 is not provided in the detection cavity 1312, it is positioned on the piezoelectric film 133 The first microelectrodes 134 are modified so that the surfaces of the first microelectrodes 134 corresponding to the first to fourth detection chambers are sequentially modified with antibodies PGI, PGII, G17 and H.pylori-IgG.
[0109] The Lamb wave sensor with the above structure, before detecting the sample, first obtains the excitation signal through the input first microelectrode 134, and then causes the mechanical vibration of the piezoelectric film 133 to generate a front piezoelectric signal, and at the same time, the first microelectrode 134 A microelectrode 134 generates the front impedance signal; then cut off the input signal, so that the Lamb sensor is in a power-off state, then the sample flows thr...
Embodiment 3
[0114] This embodiment provides a biological detection chip, including a base 14, which is provided with a groove; the Lamb wave sensor 13 described in Embodiment 1 is arranged in the groove, and is connected to the base 14 through a connecting piece. 15 forms electrical connection; Cover plate 11, covers described base 14, and described cover plate 11 is provided with the sampling hole 1122 that is positioned at described detection chamber both sides and sampling hole, and described Lamb wave sensor 13 is provided with all One side of the second microelectrode 135 faces the cover plate 11 .
[0115] In this embodiment, specifically as image 3 As shown, the upper surface of the base 14 is provided with a groove, the Lamb wave sensor 13 is arranged in the groove of the base 14, and the upper surface of the base 14 covers the seal 12 and the cover plate 11 in turn. . The side of the Lamb wave sensor 13 provided with the first microelectrode 134 faces the direction of the base...
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