A manufacturing method of microsphere resonator cavity based on electrohydrodynamic jet printing

Abstract

The invention provides a fabrication method of a microsphere resonator based on electrohydrodynamic spray printing, and relates to an optical micro-cavity. An air pipe is connected with an air pump, and a melt polymer raw material is provided for a metal storing pipe; a hanging drop is formed at a nozzle of a metal micro-channel; a heater and the metal storing pipe are tightly attached, the temperature of the melt polymer raw material in the metal storing pipe is adjusted through a temperature controller, additives are then added to the melt polymer raw material, a switch of a high-voltage power supply is turned on, the voltage of an electrode plate is adjusted to -600V, the hanging drop is ejected on a collection plate due to the effect of an electric field force, the nozzle of the metalmicro-channel is connected with a grounding terminal of the high-voltage power supply, and the electrode plate is connected with a negative voltage terminal of the high-voltage power supply; and whenthe high-voltage power supply outputs a specified voltage, the drop at the nozzle of the metal micro-channel is spray printed on the collection plate in the manner of a melt polymer jet flow to form amicro-drop having a certain contact angle with the collection plate, and the solid-phase microsphere resonator is obtained after cooling and solidification.

Description

technical field [0001] The invention relates to an optical microcavity, in particular to a method for manufacturing a microsphere resonant cavity based on electrohydrodynamic jet printing. Background technique [0002] An optical microcavity is an optical resonant cavity with a size on the order of micron or submicron, which confines light to a small area by using the effects of reflection, scattering or diffraction on the interface with a discontinuous refractive index. Optical microcavities based on Whispering Gallery Mode (ModeGallery Whispering, WGM) are current research hotspots, and are mainly divided into microsphere cavities, microdisk cavities, microring cavities, and microcore ring cavities according to their shapes. The microsphere resonator has an ultra-high cavity quality factor (greater than 10 9 ), rich whispering gallery modes, and extremely small mode volumes. In recent years, it has attracted extensive attention in the research fields of low-threshold micr...

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Problems solved by technology

[0003] There are mainly the following methods for making microsphere resonators. One is to use traditional photolithography and etching methods to make solid-phase microsphere cavities. Atomization, using the surface tension of the melt to make glass microspheres, this method is extremely efficient, but the prepared microspheres have a small cavity size (60-160 μm), and the microspheres need to be fixed before they can be used in experiments ; The third is to use CO 2 The laser ablates the end of the silica fiber to make a microsphere cavity. This method generally requires real-time monitoring of the balling process when making a microsphere cavity, and the size of the microsphere cavity is limited by the size of the fiber.

In recent years, manufacturing methods such as strong magnetic field condensation method, ultrafast pulse laser processing method, glass liquid rotation method, molding method and gamma ray irradiation method have also appeared (Yang Z, Wu Y, Zhang X, and et al., LowTemperature Fabrication of Chalcogenide Microsphere Resonators for ThermalSensing, IEEE Photonics Technology Letters, 29(1):66-69(2017).), but including the above three main manufacturing methods, most of the current microsphere cavity manufacturing methods cannot effectively control the microsphere The size of the ball cavity, and the equipment is complicated and the cost is high

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