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Mechanical arm monitoring system and method

A technology of robotic arms and monitoring systems, applied in the manufacture of electrical components, semiconductor/solid-state devices, circuits, etc., can solve problems such as mechanical aging, damage to other workpieces, and component damage, and achieve the effect of safely picking and placing substrates

Inactive Publication Date: 2017-12-26
ZING SEMICON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as the mechanical arm is used for a long time, it is easy to have the problem of mechanical aging or component damage, which will affect the accuracy of the mechanical arm, which may cause the problem of the mechanical arm bumping into other workpieces during the operation. Therefore , the precision confirmation of the robot arm is very important

Method used

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  • Mechanical arm monitoring system and method
  • Mechanical arm monitoring system and method
  • Mechanical arm monitoring system and method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] figure 1 It is a schematic diagram of the principle of the monitoring system of the robotic arm in Embodiment 1 of the present invention, figure 2 It is a schematic structural diagram of the monitoring system of the robotic arm in Embodiment 1 of the present invention, combined with figure 1 and figure 2 As shown, the robot arm 100 has a robot plate 110 for carrying substrates. Apparently, when the precision of the robot arm 100 is abnormal, the position of the manipulator plate 110 will be affected correspondingly, and then when the manipulator plate 110 picks and places the substrate, it is very easy to scratch the substrate. Therefore, the present invention utilizes a The monitoring system monitors the position of the manipulator plate 110 to reflect the positioning accuracy of the manipulator 100 . In the monitoring system of this embodiment, the position information of the manipulator plate 110 is obtained through a sensing unit 200, and the position information...

Embodiment 2

[0064] Figure 4 It is a schematic structural diagram of the monitoring system of the robotic arm in Embodiment 2 of the present invention, as Figure 4 and combine figure 1 As shown, the difference from Embodiment 1 is that in this embodiment, the sensing unit 200' is used to detect whether there is a manipulator disc 110 in its sensing area, wherein the sensing area of ​​the sensing unit 200' is the manipulator disc 110 area of ​​predetermined location. That is, when the sensing unit 200' does not detect the manipulator disc 110, it means that there is a deviation in the position of the manipulator disc 110; when the sensing unit 200' detects the manipulator disc 110, it means that there is no position deviation , the precision of the robotic arm is normal, and production operations can continue.

[0065] Specifically, the sensing unit 200' can adopt an optical fiber sensor, which includes a transmitting part 210' and a receiving part 220', the transmitting part 210' is u...

Embodiment 3

[0068] In addition, according to the above-mentioned monitoring system of the robotic arm, the present invention also provides a monitoring method of the robotic arm. Figure 5 It is a schematic flow chart of the monitoring method of the robotic arm in Embodiment 1 of the present invention, refer to Figure 5 and combine figure 1 As shown, the monitoring method includes:

[0069] S10, providing a mechanical arm, the mechanical arm includes a mechanical hand plate;

[0070] S20, using a sensing unit to acquire position information of the manipulator disc, and sending the position information of the manipulator disc to a data processing unit;

[0071] S30, using the data processing unit to determine whether there is a deviation in the position of the manipulator disc.

[0072] Wherein, in step S20-S30, can refer to Figure 6a A method for judging the position deviation of the manipulator disc is shown. That is, in step S20, the method for the sensing unit to acquire the pos...

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Abstract

The invention provides a mechanical arm monitoring system and method. The monitoring system comprises an induction unit and a data processing unit, wherein the induction unit is used for obtaining position information of a mechanical hand disc and sending the position information to the data processing unit, and the data processing unit is used for determining whether deviation exists in a position of the mechanical hand disc based on the received position information. Via the mechanical arm monitoring system and method provided in the invention, precision of mechanical arms can be monitored while production operation of the mechanical arms is not affected, proper taking and placing as well as installation of substrates can be ensured, exception can be discovered timely, and the exception can be prevented from escalation.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a monitoring system and a monitoring method of a mechanical arm. Background technique [0002] With the continuous development of the degree of mechanization, the mechanical arm gradually replaces the manual execution of various actions, so that automated production can be realized. Moreover, compared with manual operation, the use of robotic arms for operation has higher precision. Therefore, for some occasions that require high precision, robotic arms are the best choice. However, as the mechanical arm is used for a long time, it is easy to have the problem of mechanical aging or component damage, which will affect the accuracy of the mechanical arm, which may cause the problem that the mechanical arm bumps into other workpieces during the operation. Therefore , the accuracy confirmation of the robotic arm is very important. Contents of the invention [0003] The pur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67242H01L21/67259
Inventor 赵旭良
Owner ZING SEMICON CORP
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