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Manufacturing method of piezoelectric crystals

A technology of piezoelectric crystals and manufacturing methods, which is applied in the field of manufacturing surface acoustic wave filters, can solve problems such as inability to grow yields, lack of market competitiveness, etc., to save subsequent annealing processes, reduce process steps and energy consumption , the effect of low degree of overheating

Inactive Publication Date: 2017-11-03
TDG HLDG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Due to the continuous expansion of the application field of the surface acoustic wave filter (SAW), according to the design requirements of the device, the demand for a lot of unconventional axial lithium tantalate, iron-doped lithium tantalate and lithium niobate crystals has increased. The growth technology of Rafa has encountered a very large bottleneck, especially some axial directions close to the crystal dissociation plane, which cannot be grown or the yield is very low, and there is no market competitiveness

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  • Manufacturing method of piezoelectric crystals

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Embodiment 1

[0027] Embodiment 1: a kind of manufacturing method of piezoelectric crystal, described piezoelectric crystal is lithium tantalate crystal, specific process is as follows,

[0028] (1) Thermal field assembly: install the thermal field in sequence (as attached figure 1 shown), and at the same time fill the iridium crucible with 36kg of lithium tantalate raw material;

[0029] (2) Heating and melting: the iridium crucible is heated by resistance heating, and the temperature in the crucible is heated to above 1650°C in about 15 hours, and the lithium tantalate raw material is melted into a molten soup;

[0030] (3) Seeding: Adjust the output power of the main heater, the liquid surface temperature is 1650 ℃ ~ 1660 ℃, form a stable thermal convection, keep the constant heating output power for more than 5 hours, so that the molten soup is in a thermally stable state, and the convection center is positive Lithium tantalate seed crystals in the X direction are placed above, so that...

Embodiment 2

[0036] Embodiment 2: the manufacturing method of the second piezoelectric crystal, the piezoelectric crystal is an iron-doped lithium tantalate crystal, the specific process is as follows,

[0037] (1) Thermal field assembly: Install the thermal field in sequence, and at the same time fill the iridium crucible with 36kg of iron-doped lithium tantalate raw material;

[0038] (2) Heating and melting: The iridium crucible is heated by resistance heating, and the temperature in the crucible is heated to above 1650°C in about 15 hours, and the raw material of iron-doped lithium tantalate is melted into a molten soup;

[0039] (3) Seeding: Adjust the output power of the main heater, and the liquid surface temperature is between 1650°C and 1660°C to form a stable heat convection. Keep a constant heating output power for more than 5 hours, so that the molten soup is in a thermally stable state. Put the lithium tantalate seed crystal in the X direction from directly above the convection...

Embodiment 3

[0046] Embodiment 3: the manufacture method of the 3rd kind of piezoelectric crystal, described piezoelectric crystal is lithium niobate crystal, and specific process is as follows,

[0047] (1) Thermal field assembly: install the thermal field in sequence, and fill 23kg of lithium niobate raw material into the iridium crucible at the same time;

[0048] (2) Heating and melting: the iridium crucible is heated by resistance heating, and the temperature in the crucible is heated to above 1260°C in about 12 hours, and the lithium niobate raw material is melted into a molten soup;

[0049] (3) Seeding: Adjust the output power of the main heater, and the liquid surface temperature is between 1260°C and 1270°C to form a stable heat convection. Keep a constant heating output power for more than 5 hours, so that the molten soup is in a thermally stable state. Put the lithium niobate seed crystal in the Z direction from directly above the convection center, make the seed crystal conta...

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Abstract

The invention discloses a manufacturing method of piezoelectric crystals. The manufacturing method includes that a kyropoulos method is used to grow piezoelectric crystals, and crystal bars of 2-6 inches and in any axial direction can be taken out from crystal ingots; the kyropoulos method includes that when the crystal growing process enters an equal diameter stage, a mode of stopping upward lifting or slight lifting is adopted to enable crystals to grow naturally, lifting speed is smaller than 0.1mm / h, the crystals do not rotate, and the top end of each crystal is not higher than an opening of a crucible during crystal growing. The crystal bars of 2-6 inches and in any axial direction can be taken out of the crystal ingots to meet requirements on various crystal axial directions during designing of a surface acoustic wave (SAW) filter, and especially the problem that some conventional Czochralski methods (CZ) cannot grow crystals in axial directions is solved.

Description

technical field [0001] The present invention relates to a kind of manufacturing method of piezoelectric crystal, particularly a kind of method of growing lithium tantalate, iron-doped lithium tantalate and lithium niobate crystal by Kyropoulos method, and this material is used in making surface acoustic wave filter (SAW ). Background technique [0002] In recent years, due to the widespread use of high-band and multi-band communications in wireless communications represented by mobile phones, the demand for surface acoustic wave filters (SAW) has increased significantly, and its quality requirements are also higher. With the continuous development of surface acoustic wave technology, the application fields of surface acoustic wave devices continue to expand, and the market prospect is getting wider and wider. Only the surface acoustic wave filter can see its broad market prospect. Since the 1990s, the application of SAW filters in mobile phones has grown very rapidly, and e...

Claims

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Application Information

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IPC IPC(8): C30B29/30C30B17/00
CPCC30B29/30C30B17/00
Inventor 徐秋峰张寒贫张忠伟张鸿张坚陈晓强沈礼东陈铖沈晓燕
Owner TDG HLDG CO LTD
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