Evaporation equipment, crucibles and evaporation method

Abstract

The invention discloses evaporation equipment. The evaporation equipment comprises a main cavity, a vacuumizing device connected with the main cavity, a control device and at least one evaporation station, and further comprises at least one storage cavity and a crucible replacing device which is capable of being controlled by the control device to hoist and clamp crucibles and transfer the crucibles between the evaporation stations and the storage cavities, wherein the storage cavities communicate with the internal space of the main cavity through first through holes, the first through holes are provided with isolation sealing pieces which can be controlled by the control device to be shifted so as to enable the first through holes to be opened or closed, and the evaporation positions are located on the inner side of the bottom of the main cavity and are provided with heating devices; and the crucible replacing device comprises a telescopic lifting type rotary hoisting mechanism, and the telescopic lifting type rotary hoisting mechanism is connected with the bottom surface of the main cavity and is located in the inner space of the main cavity. According to the evaporation equipment, the plurality of storage cavities are arranged, the number of standby crucibles is increased, so that the number of times of damaging the vacuum environment of the main cavity is reduced, meanwhile, water pollution and oxygen pollution brought by the operation to the main cavity are reduced, and the production efficiency of an OLED is improved.

Description

technical field [0001] The invention relates to the field of display manufacturing, in particular to an evaporation equipment, a crucible and an evaporation method. Background technique [0002] Among flat-panel displays, Organic Light-Emitting Diode (OLED) displays have the advantages of wide viewing angles, high brightness, high contrast, low driving voltage, and fast response, and are considered to be the next-generation display technology, and are known for their bright colors , low power consumption, thin products and many other advantages have been loved by consumers in the market. At present, the method of realizing mass production of OLED devices is mainly the evaporation method. Since OLED devices are very sensitive to water and oxygen, when making OLED displays, it needs to be carried out under high vacuum conditions, and the resistance wire is used to control the source placed in a special crucible. The material is heated, the source material is evaporated to for...

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Problems solved by technology

[0004] The purpose of the present invention is to provide an evaporation equipment, a crucible and an evaporation method, which solves the problem of the need to frequently break the vacuum environment of the evaporation chamber to replace the crucible or add source materials due to the limited amount of filling in a single crucible during the evaporation process. , thereby delaying the production time, and frequently breaking the vacuum environment of the evaporation chamber to cause water and oxygen pollution

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