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Light irradiation device and light irradiation method

A light irradiation device and light irradiation technology, applied in optics, nonlinear optics, instruments, etc., can solve the problems of insufficient light quantity and inability to master, and achieve the effect of high-precision power control

Active Publication Date: 2021-09-03
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, it becomes impossible to grasp that processing is performed when the light quantity is insufficient.
Also, in this case, when the processing is restarted after the inspection, the failure may occur again and the processing is performed when the illuminance is insufficient, and further processing for insufficient light intensity is performed.

Method used

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  • Light irradiation device and light irradiation method
  • Light irradiation device and light irradiation method
  • Light irradiation device and light irradiation method

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Embodiment Construction

[0097] Next, an aspect (hereinafter, referred to as an embodiment) for carrying out the invention of the present application will be described. In the following description, as an example of light irradiation, an apparatus and a method for irradiating polarized light for photo-alignment are given. However, the present invention is not limited to the apparatus and method for this use.

[0098] Figure 1 ~ Figure 3 is a schematic diagram of the light irradiation device of the embodiment, figure 1 is a three-dimensional schematic diagram, figure 2 is the main view sketch map, image 3 It is a schematic side view. Figure 1 ~ Figure 3 The shown light irradiation device includes: a light irradiator 1 that irradiates light toward a set effective irradiation area; a table 2 that holds an object W on the upper side; A transport mechanism 3 for the object W; and a controller 7 for controlling each part of the device. In this embodiment, light irradiation is performed for light t...

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Abstract

The present invention provides a light irradiation device and a light irradiation method which monitor whether an object is irradiated with an appropriate amount of light at an optimum timing, and appropriately control a light source based on the monitoring result. The table (2) holding the object (W) on its upper side is moved in the X direction by the transport mechanism (3), and the workpiece (W) is irradiated with light when passing through the irradiation area. The measured value of the illuminance meter installed on the side surface (21) of the table (2) is sent to the controller (7), and the lighting control unit (73) included in the controller (7) integrates the measured value to calculate the light amount, And compared with the light reference value set as the light quantity, the control command signal is sent to the lighting power supply (110) of the light source (11) in such a manner that the difference disappears.

Description

technical field [0001] The invention of the present application relates to a device and a method for irradiating an object with light for various purposes. Background technique [0002] The industrial use of light is progressing in various fields, and light is irradiated to an object for various purposes. In particular, photoprocessing techniques for changing the properties of objects by light are widely used in the manufacturing process of various products. [0003] For example, in recent years, in the manufacturing process of a liquid crystal display, the photoprocessing called photo-alignment is used more frequently. Photo-alignment is a technique in which an alignment film (a film to be an alignment layer) is obtained by irradiating light on a film material for an alignment layer when obtaining an alignment layer for a liquid crystal display or an alignment layer for a viewing angle compensation film. . [0004] In the field of such light processing, the following con...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1337
CPCG02F1/133788Y02B20/40
Inventor 木村淳治
Owner USHIO DENKI KK
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