Gyroscope self-calibration device and method

Abstract

Provided is a gyroscope self-calibration device and method. The gyroscope self-calibration device comprises a signal generator and a signal processing circuit, wherein the signal generator is used for producing modulating signals including a drive signal and an electric excitation signal, the modulating signals are used for driving a gyroscope to output a current signal having a phase shifting component, the signal processing circuit is used for processing the current signal output by the gyroscope to obtain a voltage value, and the angular velocity of the electric excitation signal in the modulating signals and the voltage value form linear relation. The gyroscope self-calibration device adopts the modulating signals to replace a traditional high-precision physical turntable and completes self calibration of the gyroscope. Therefore, a factory-leaving standardization calibration procedure of the gyroscope is simplified, and the self calibration cost is reduced. In the usage process of the gyroscope, a user can perform self calibration of the gyroscope in real time, so that device parameter change produced due to device ageing, environment temperature change, system noise and the like is avoided in the using process of the gyroscope, and reduction of the precision of the gyroscope is avoided.

Description

technical field [0001] The invention belongs to the field of intelligent sensors, and more specifically relates to a gyroscope self-calibration device and method. Background technique [0002] Micro-Electro-Mechanical System (MEMS for short) gradually grew up with the development of silicon micromachining technology in the 1980s. It is the product of the combination of microelectronic planar processing technology and silicon micromachining technology. Silicon micromachining technology mainly includes silicon micromachining technology, surface micromachining technology, bonding technology, LIGA technology, etc. Microsensors or actuators with scales ranging from micrometers to millimeters are fabricated on silicon wafers, glass and other materials through these technologies. [0003] MEMS is a complex system that integrates microsensors, microactuators and circuits. MEMS has the characteristics of optical, mechanical and electrical integration, small size, light weight, low ...

AI Technical Summary

Problems solved by technology

[0004] Calibration and calibration of traditional gyroscopes requires high-precision turntables and other external equipment for support, which is complicated to operate and high in cost; and usually only calibrated and calibrated before leaving the factory, due to limited conditions during use, gyroscopes cannot be calibrated and calibrated; and During use, the gyroscope will change the device parameters due to device aging, environmental temperature changes, system noise and other reasons, resulting in a decrease in the accuracy of the gyroscope measurement. Therefore, the MEMS gyroscope has always been in the ranks of low-precision gyroscopes, limiting The application field of MEMS gyroscope

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