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Preparation Technology of Composite Nitride Coating on Tool and Die Surface

A surface compounding and preparation technology, which is applied in the coating process of metal materials, coating, superimposed layer plating, etc., can solve the problem of poor bonding strength between the coating and the substrate, high structural stress of the coating, and low ionization rate of atoms and other problems, to achieve the effect of good film-base binding force, good stability and high microhardness

Active Publication Date: 2019-03-15
CHENGDU REALLY SHARP COATING TECH CO LTD +2
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0012] Compared with ion plating technology, reactive magnetron sputtering technology has lower deposition efficiency, lower atomic ionization rate, and greater stress in the prepared coating structure, so the bonding strength between the coating and the substrate is often not as good as Coatings prepared by ion plating

Method used

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  • Preparation Technology of Composite Nitride Coating on Tool and Die Surface
  • Preparation Technology of Composite Nitride Coating on Tool and Die Surface
  • Preparation Technology of Composite Nitride Coating on Tool and Die Surface

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Embodiment Construction

[0046] The present invention will be further described below through specific embodiments and examples.

[0047] The method of the present invention can be implemented in the following ways:

[0048] The preparation process of the composite nitride coating on the surface of the tool and die. When coating the film, a binary evaporation source technology combining vacuum ion evaporation plating and magnetron sputtering ion plating is used; 2 In a mixed atmosphere with Ar, the Ti element is evaporated by the electron beam evaporation source to form a traditional TiN film. While the TiN film is deposited and formed, the Me element is implanted by the magnetron sputtering source, and the surface of the tool and die is plated (Ti, Me) N layer; the Me is at least one of Ti, Al, Cr, and Si; specifically including the following steps:

[0049] (1) Pre-processing of tools and molds and equipment inspection;

[0050] (2) Vacuum and preheat;

[0051] (3) Electron beam heating; the pressure of the ...

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Abstract

The invention discloses a tool and mold surface complex nitride coating preparation process and belongs to the technical field of micro-nanometer coatings. According to the process, a binary evaporation source technology combing vacuum ion evaporation plating with magnetron sputtering ion plating is adopted during coating plating; at a mixed atmosphere of N2 and Ar, the Ti element is evaporated through an electron beam evaporation source, a traditional TiN film is formed, while the TiN film is formed through deposition, the Me element is implanted through a magnetron sputtering source, and a N (Ti and Me) layer is plated on the tool and mold surfaces; and Me is at least one of Ti, Al, Cr and Si. Through the process, the combination property of a tool and a mold can be improved.

Description

Technical field [0001] The invention belongs to the technical field of micro-nano coatings, and specifically relates to a process for preparing a composite nitride coating on the surface of a tool and mold. Background technique [0002] Surface coating technology, as a new technology for modern cutting tool applications, uses chemical or physical methods to obtain micro-nano-scale films on the surface of the tool. Due to its high hardness, good lubricity, and excellent high temperature performance, it can make The cutting tool obtains excellent comprehensive mechanical properties, which effectively prolongs the service life of the tool, improves the cutting performance of the tool, and improves the machining efficiency. [0003] After 1980, TiN coating technology of physical vapor deposition (PVD) has been widely used in molds. The superiority of TiN coating and the cleanness of the preparation process have promoted the rapid development of this technology. With the development o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C28/00C23C14/14C23C14/06C23C14/35
CPCC01P2002/72C23C14/0036C23C14/0641C23C14/14C23C14/354C23C28/322C23C28/325C23C28/34
Inventor 赵海波刘亚鲜广梁红樱但秦
Owner CHENGDU REALLY SHARP COATING TECH CO LTD
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