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Optical free-form surface self-adaptive non-zero interferometric detection system

A technology of interference detection and non-zero position, which is applied in the direction of using optical devices, measuring devices, instruments, etc., to achieve the effect of realizing automatic full-caliber non-zero position detection, expanding the dynamic range, and avoiding the use of

Active Publication Date: 2019-02-19
ANHUI UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide an optical free-form surface self-adaptive non-zero interference detection system to solve the problems existing in the prior art optical free-form surface detection

Method used

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  • Optical free-form surface self-adaptive non-zero interferometric detection system
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  • Optical free-form surface self-adaptive non-zero interferometric detection system

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Embodiment

[0030] An example of the application of the present invention to optical free-form surface adaptive non-zero position interference detection is described as follows.

[0031] The measured free-form surface is a double-curvature surface, and the radius of curvature in the x direction is 388mm; the radius of curvature in the y direction is 386mm.

[0032] figure 1 It is a free-form surface adaptive interference detection device diagram, the laser wavelength is λ=632.8nm, the thin beam emitted by the frequency-stabilized laser L1 is expanded into a wide-beam parallel light through the collimation system L2, and the parallel light propagates forward to the beam splitter L3 is divided into two paths of light. One path propagates forward to the reference plane mirror L4, and then the original path returns as a reference wave; the other path propagates forward to the deformable mirror DML8 placed at 45° to the optical axis, and after being reflected by the deformable mirror DML8, it...

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Abstract

The invention discloses an optical free-form surface adaptive non-zero interference detection system, which includes a free-form surface non-zero interference detection system, an adaptive data processing and control system, wherein the free-form non-zero interference detection system includes a frequency-stabilized laser, Collimation system, beam splitter, reference plane mirror, imaging mirror, detector, deformable mirror DM, mirror, aplanatic mirror; adaptive data processing and control system includes system ray tracing module, theoretical surface shape decomposition module , DM deformation control module, interferogram matching processing module, measured wavefront fitting module and backhaul error correction module. The invention utilizes the continuous deformable mirror DM to realize the compensation of different Zernike low-order aberrations, guides the deformation of the deformable mirror through the system ray tracing model, and makes the high-precision generalized detection of free-form surfaces with large curvature changes a reality.

Description

technical field [0001] The invention relates to the field of optical free-form surface detection systems, in particular to an optical free-form surface adaptive non-zero interference detection system. Background technique [0002] Due to its large surface degree of freedom, the optical free-form surface can provide or correct different on-axis or off-axis aberrations in a targeted manner, and at the same time meet the requirements of high performance, light weight and miniaturization of modern optical systems, thus gradually becoming a modern optical system. The new favorite in engineering. Although there has been steady development in design, processing, and testing, the high-precision requirements for the surface shape of optical components in the imaging field have limited the large-scale application of free-form surfaces. In particular, the detection technology of free-form surfaces has become the most important factor restricting its application. [0003] At present, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 张磊李劲松俞本立
Owner ANHUI UNIVERSITY
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