Electrochemical Microseismometer
An electrochemical and wave detector technology, applied in the field of sensors, can solve the problems of system instability and DC drift of output signals, and achieve the effect of expanding the working range, reducing the complexity and being convenient to carry.
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[0051] The present invention proposes a force balance negative feedback mechanism suitable for small-scale MEMS electrochemical microseismic detectors based on the MEMS electrochemical microseismic detector, through the combination of signal processing circuit and mechanical structure, and using the control system principle , in order to achieve the purpose of expanding the working frequency band of the small MEMS electrochemical microseismic detector.
[0052] In an exemplary embodiment of the present invention, an electrochemical microseismometer is provided. figure 1 It is a schematic structural diagram of an electrochemical microseismometer according to an embodiment of the present invention. Such as figure 1 As shown, the microseismic detector of the present embodiment comprises:
[0053] base 10;
[0054] The inertial pendulum 20 is supported on the base 10, and an electrolyte space A is formed therein, and electrolyte is filled in the electrolyte space;
[0055] Sen...
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