Three-degree-of-freedom piezoelectric drive platform based on inertial impact
A piezoelectric drive and inertial impact technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., to achieve the effects of small output error, fast response, and stable output displacement
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[0029] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0030] refer to Figure 1 to Figure 10 , the three-degree-of-freedom piezoelectric drive platform based on inertial impact includes an output platform 1, a metal substrate 2, an inertial mass block 3, a piezoelectric wafer 4, a driver connecting shaft 5, an upper slide plate 6, a lower slide plate 7, a cylindrical guide rail 8 and a fixed platform9.
[0031] The output platform 1 is a circular part made of steel plate. The output platform 1 is processed with four symmetrical through holes about the center. The metal substrate 2 is a rectangular part made of a metal plate. The end of the metal substrate 2 is processed with a circular through hole. The inertial mass 3 is a cuboid part made of a metal block. The center of the inertial mass 3 is processed with a circular through hole. The driver connecting shaft 5 is a steel cylindrical part. The side of the driver connec...
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