SiCO-carbon nanotube composite film electrode for lithium battery
A carbon nanotube composite, thin-film electrode technology, applied in battery electrodes, non-aqueous electrolyte battery electrodes, electrode manufacturing, etc. Chemical properties and mechanical properties, good adhesion, controllable components
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[0026] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but not as a basis for limiting the present invention.
[0027] Example. A kind of SiCO-carbon nanotube composite film electrode for lithium battery, constitutes as follows figure 1 As shown, a single crystal silicon substrate 1 is included, and a TiN barrier layer 2, a Cu thin film layer 3, a CuO thin film layer 4, a SiCO thin film layer A5, a Ni catalyst layer 6, a carbon nanotube layer 7 and SiCO thin film layer B8.
[0028] The thickness of the TiN barrier layer 1 is 95-105nm.
[0029] The thickness of the Cu thin film layer 2 is 290-310 nm, and the thickness of the CuO thin film layer 4 is 95-105 nm.
[0030] The thickness of the SiCO thin film layer A5 is 190-210 nm; the thickness of the Ni catalyst layer 6 is 45-55 nm; the thickness of the carbon nanotube layer 7 is 95-105 nm; the SiCO thin film layer B8 The thickness is 190-210 nm.
[0031] T...
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