Method for manufacturing third-generation image intensifier by using gallium arsenide wafer
A technology of image intensifier and gallium arsenide crystal, which is applied in the field of making third-generation image intensifiers using gallium arsenide wafers, can solve the problems that the product qualification rate is only 40%, the input and income are not proportional, and the air is not easy to be completely eliminated. Strong practical value, low cost, and low probability of occurrence
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[0029] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0030] Such as figure 1 , figure 2 Shown, overall steps of the present invention are as follows:
[0031] One: Clean the gallium arsenide wafer, and then plate a conductive layer to make the resistance reach the rated standard;
[0032] First of all, when the cleanliness is greater than 100 and the vacuum degree is greater than 10 -5 GaAs wafers are ultrasonically cleaned in the clean room of Pa, so that the clean room standard meets the environmental requirements of vacuum device process cleanliness; strictly following the clean room work requirements and maintaining its cleanliness is the basic guarantee for making image intensifiers. Ultrasonic cleaning is effective in loosening strongly bonded contaminants on the surface of GaAs wafers.
[0033] According to the different types of pollutants, pure water or organic solvent cle...
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