Optical system for shape measurement

Abstract

The invention discloses an optical path system for topography measurement. The optical path system for topography measurement comprises a white light source 1, three light splitting prisms, a microscopic ocular lens 5, a microscopic object lens 6, an interference object lens 7, a four-quadrant photoelectric sensor 8, a laser device 9 and an image sensor 10, the optical path system for topography measurement further has two measurement optical paths and laser measurement paths, for the laser measurement paths, laser starts from the laser device 9, is turned through the third light splitting prism 4, is focused through the microscopic object lens 6 onto a detected surface 11, is reflected by the detected surface 11, respectively passes through the microscopic object lens 6, the third light splitting prism 4 and the second light splitting prism 3 and is projected to the four-quadrant photoelectric sensor 8 for height information measurement of the detected surface 11; laser starts from the laser device 9, is reflected by the detected surface 11, is turned through the second light splitting prism 3, passes through the second light splitting prism 2 and the microscopic ocular lens 5 and is imaged together with illumination background light formed by the white light source 1 to the image sensor 10 to form acquisition images during laser measurement.

Description

technical field [0001] The invention relates to a shape measuring device, in particular to the processing surface quality and shape detection in the manufacturing process of ultra-precision machined mechanical parts and optical components. Background technique [0002] Surface topography refers to the geometry of the interface between the object and the surrounding medium. The basic shape of the surface and surface defect parameters such as waviness, texture, and surface roughness together constitute the characteristics of the original topography of the object surface. The surface morphology formed by machining, surface treatment and other processes directly affects its function and performance. With the rapid development of the defense industry, aerospace and machinery manufacturing and other fields, the demand for ultra-precision machining parts is also increasing, and the surface morphology and structure of products are becoming more and more complex. Therefore, the mecha...

AI Technical Summary

Problems solved by technology

However, the measurement data sampling rate of the above methods is relatively low, and only the basic shape of the surface topography (low-frequency information of the surface topography) can be obtained.

The contact profiler is only suitable for collecting roughness information on a certain contour line of the surface (high frequency information of surface topography)

However, surface detail information such as texture or waviness of surface topography (intermediate frequency information of surface topography) has a great influence on performance

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