Parallel-connection translational three-dimensional rapid servo device of numerical control ultraprecision processing machine tool

Abstract

The embodiment of the invention discloses a parallel-connection translational three-dimensional rapid servo device of a numerical control ultraprecision processing machine tool, and aims to solve the technical problems of a traditional FTS device that machining cost is high; machining efficiency is low; multi-degree of freedom displacement error compensation cannot be realized; and absolute rigidity in other directions cannot be ensured. The parallel-connection translational three-dimensional rapid servo device comprises an X-direction driving platform, a Y-direction driving platform, a Z-direction driving platform, main flexible hinges, a subsidiary flexible hinge and a tool, wherein the X-direction driving platform and the Y-direction driving platform are connected with the tool through the main flexible hinges; and the Z-direction driving platform is connected with the tool through the subsidiary flexible hinge.

Description

Technical field [0001] The invention relates to the field of free-form surface optical elements, in particular to a parallel translational three-dimensional fast tool servo device for a numerically controlled ultra-precision machining machine tool. Background technique [0002] Free-form optical elements have significant advantages such as improving optical performance, optimizing product structure, and achieving lightweight. With the rapid development of modern science and technology, the application fields of free-form optical components are gradually expanding, not only in core technical fields such as aviation, aerospace, national defense, and military, but also in ordinary civilian, office and other daily life. It is also widely used in medical optical cameras, scanners, infrared night vision devices and other fields. Among them, the use of fast tool servo (FTS) technology to process free-form surface optical components is considered to be the most promising processing meth...

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Problems solved by technology

[0010] The embodiment of the present invention provides a parallel translational three-dimensional fast tool servo device for a CNC ultra-precision machining machine tool, which solves the problem of high processing cost and low processing efficiency of the traditional FTS device, which cannot realize multi-degree-of-freedom displacement error compensation, and is difficult to ensure that other directions A Technical Problem on the Absolute Stiffness

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