MEMS gyroscope test device, system and method

Abstract

The invention discloses an MEMS gyroscope test device, system and method. The device comprises a high-low-temperature box (4), wherein a rotating table top (3), a driving motor, a temperature control system, a sliding ring and a single / multi-chip test plate (1) are arranged inside the high-low-temperature box (4); a rotating table control system is arranged outside the high-low-temperature box (4); a data collecting plate (2) is also arranged inside the high-low-temperature box (4); the data collecting plate (2) is arranged on the rotating table top (3); the data collecting plate (2) receives analog output signals from the single / multi-chip test plate (1), performs analog-to-digital conversion, and then outputs the converted digital signals to the outside of the high-low-temperature box (4) through the slide ring. The data collecting plate is arranged inside the high-low-temperature box (4); the output signals of the tested single / multi-chip are converted into digital signals; then, the converted digital signals are transmitted to the host machine through the slide ring; the real and reliable measuring results with small errors, high precision can be obtained.

Description

technical field [0001] The invention relates to a MEMS gyroscope testing device, system and method. Background technique [0002] The Coriolis force is the Coriolis force, which is a description of the offset of the linear motion of the particle in the rotating system due to inertia relative to the linear motion generated by the rotating system. The rotating gyroscope will reflect various forms of linear motion, and the motion can be measured and controlled by recording the Coriolis force on the gyroscope components. [0003] MEMS gyroscopes are widely used in the fields of small size, light weight, low power consumption, high reliability, easy installation, low maintenance cost, anti-vibration, anti-shock integrated navigation, virtual reality, mobile phones, drones, robots, etc. However, traditional gyroscopes such as fiber optic gyroscopes and laser gyroscopes are being impacted by the market from MEMS gyroscopes due to their shortcomings such as large size, heavy weight...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art, provide a MEMS gyroscope testing device, system and method, and solve the prior art of outputting the measured analog signal in the high and low temperature box to the outside through the slip ring of the turntable for data acquisition The analog-to-digital conversion of the equipment will introduce a large interference signal into the measured signal, which reduces the signal-to-noise ratio of the useful signal, resulting in large error and low precision of the test result, and the problem that the real measurement result cannot be obtained.

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