An optical fiber type three-dimensional trigger probe device and measurement method

Abstract

A fiber-optic three-dimensional trigger probe device and measurement method, the device includes a light source, an optical fiber measuring rod, an elastic reset mechanism, a measuring ball coated with a reflective film, and a photoelectric detection unit, the optical fiber measuring rod has a central optical fiber and 4N receiving optical fibers coaxially and uniformly distributed around the central optical fiber, N is a positive integer, and the elastic reset mechanism is arranged between the optical fiber measuring rod and the measuring ball to reset the measuring ball to In the initial position, the light source emits constant power light and is transmitted to the measuring ball through the central optical fiber, and the light reflected by the reflective film is transmitted to the photoelectric detection unit through the receiving optical fiber. The device can overcome the measurement error caused by the force deformation of the measuring rod during detection, and has high resolution and measurement accuracy at the same time.

Description

technical field [0001] The invention relates to the field of optical precision measurement, in particular to a fiber-optic three-dimensional trigger probe device and a measurement method. Background technique [0002] In recent years, with the rapid development of the automobile industry, the electronics industry, the aerospace industry and the national defense industry, higher and higher requirements have also been placed on the technical fields such as micro-machines, ultra-precision machining, and micro-assembly, making the The requirements for the precision parts are getting higher and higher, and the precision requirements for the precision parts processed are becoming more and more strict, and the requirements for the instruments to detect these precision parts are also getting higher and higher. For testing and measuring instruments, the coordinate measuring machine (CMM) is a typical precision measuring instrument. [0003] Since the advent of the first quasi-coordi...

AI Technical Summary

Problems solved by technology

No matter which method of sensing trigger is used, the contact of the measuring end drives the measuring rod to shift and trigger together. The existing anisotropy and the deformation of the measuring rod caused by contacting the measuring part will bring errors, although it can be Change the measurement sensing method and reduce the touch force to reduce the error, but not eliminate it essentially, which will lead to factors such as false triggering and affect the wide use of the probe

[0005] To sum up, the contact trigger probe is currently the most widely used, but its structure is limited, which restricts the improvement of its measurement accuracy. Therefore, it is necessary to fundamentally eliminate the anisotropy and the force and deformation of the measuring rod. Error, it is necessary to break through the traditional trigger measurement model, so that the accuracy of the contact trigger probe can be further improved

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