Device and method for detecting state of technological door of semiconductor heat treatment equipment

Abstract

The invention discloses a device for detecting the state of a technological door of semiconductor heat treatment equipment, and the device comprises at least three buffers which are not located in the same line, and a detection unit. The buffers are fixed between the lower end face of the technological door and a supporting disc, and each buffer comprises a sleeve which passes through and is fixed on the supporting disc; a top column which is disposed in the sleeve, wherein the upper end face of the top column is fixedly connected with the lower end face of the technological door; a spring, wherein the top of the spring is connected with the lower end face of the top column; a strain sensor which is disposed at the bottom of the spring, and is used for measuring the strain caused by the deformation of the spring; and a screw plug which is disposed below the strain sensor and is fixedly connected with the lower end of the sleeve. When the technological door rises to a closing position of the technological door, the detection unit can quickly and accurately detect the sealing state and / or levelness of the technological door according to the measurement values of all strain sensors.

Description

technical field [0001] The invention relates to semiconductor heat treatment equipment, in particular to a semiconductor heat treatment equipment process door state detection device and detection method. Background technique [0002] Semiconductor heat treatment equipment is semiconductor equipment that performs heat treatment processes such as oxidation and annealing on silicon wafers. Generally speaking, semiconductor vertical heat treatment equipment supports a quartz boat full of silicon wafers through the process gate, and performs various heat treatment processes on silicon wafers in the thermal reaction tube. Among them, the function of the process door is to close the heat reaction tube, to prevent the loss of heat energy in the heat reaction tube, and the leakage of process gas or the entry of external air. [0003] The levelness of the process door is the main index to measure the installation quality of the process door, which directly affects the sealing of the ...

AI Technical Summary

Problems solved by technology

[0004] When adjusting the levelness of the craft door, first pre-tighten the three springs according to past experience, and then rely on the level to adjust one by one. However, this method is very time-consuming for each installation and adjustment, and it is also very difficult to accurately ensure the levelness of the craft door.

In addition, since the buffer body does not have a ruler or any distance measuring tools, it is not convenient for real-time observation during installation and debugging

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