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Three-shaft fluxgate sensor

A fluxgate sensor and door sensor technology, applied in instruments, measuring magnetic variables, measuring devices, etc., can solve problems such as poor fluxgate sensor performance and sensor damage, achieve high consistency, reduce mass production, and shorten size and the effect of the manufacturing cycle

Active Publication Date: 2017-04-19
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since a through hole needs to be drilled in the manufacturing process to realize the upper and lower communication of the magnetic core, the sensor may be damaged during the through hole process
Also, fluxgate sensors perform poorly according to this method compared to MEMS technology

Method used

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Embodiment Construction

[0030] The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

[0031] like Figure 1-4 As shown, the MEMS three-axis fluxgate sensor based on silicon cube-glass bonding of the present invention includes a silicon cube base 1, three MEMS uniaxial fluxgate sensor chips 2; wherein the MEMS uniaxial The fluxgate sensor chip 2 includes a glass substrate 4 , an excitation coil 5 , a detection coil 6 , a magnetic core 7 , electrodes 8 and a polyimide film 9 . The three 1cm*0.5cm*0.12cm microelectromechanical system uniaxial fluxgate sensor chips 2 are respectively located on three orthogonal planes with common vertices of the 1cm*1cm*1cm silicon cube base 1, and are bonded by silicon-glass Technology uses silicon bonding positioning alignment symbol 3 and copper bonding positioning alignment symbol ...

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PUM

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Abstract

The invention discloses a micro electro mechanical system three-shaft fluxgate sensor based on silicon cube-glass bonding, and relates to the field of micro electro mechanical systems. The three-shaft fluxgate sensor comprises a 1 cubic centimeter silicon cube base and three micro electro mechanical system single-shaft fluxgate sensor chips. Each micro electro mechanical system single-shaft fluxgate sensor chip comprises a glass substrate, an exciting coil, a detecting coil, a magnetic core, an electrode and a polyimide film. The three micro electro mechanical system single-shaft fluxgate sensor chips are precisely located and fixed to three planes with orthorhombic peaks of the silicon cube base respectively in the three orthorhombic directions through silicon-glass bonding. The problem that an existing three-shaft fluxgate sensor is large in size, large in weight and large in power consumption is solved, and bonding of the micro electro mechanical system single-shaft fluxgate sensor chips and the silicon cube base is adopted for the micro electro mechanical system three-shaft fluxgate sensor adopting silicon cube-glass bonding, so that the size of the high-precision three-shaft fluxgate sensor is effectively reduced.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems, in particular to a silicon cube-glass bonding microelectromechanical system three-axis fluxgate sensor for measuring weak magnetic fields. Background technique [0002] As a traditional weak magnetic field detection device, the fluxgate sensor has always had its unique advantages and cannot be replaced by other magnetic field sensors. In recent years, it has continuously discovered its application potential in new fields, such as GPS positioning of small mobile devices, Missile inertial guidance, small satellite azimuth and attitude control, motion detection in virtual reality space, etc. In recent years, since applications of various fields have been gradually expanded, requirements for devices tend to be thinner, lighter, and cheaper. Correspondingly, fluxgate sensors are also trying to become thinner, lighter, and cheaper. [0003] The traditional fluxgate sensor uses a solid sk...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/05
CPCG01R33/05
Inventor 雷冲周勇
Owner SHANGHAI JIAO TONG UNIV
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