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High dynamic range infrared imaging spectroscopy

A dynamic range, beam technology for use in imaging scanners

Active Publication Date: 2017-03-29
AGILENT TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among the many samples of interest, the range of reflectance observed for the sample is challenging because the dynamic range of the detector is not sufficient to measure the reflected light with sufficient precision

Method used

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Embodiment Construction

[0013] refer to figure 1 To make it easier to understand the manner in which the invention provides its advantages, the figure illustrates one embodiment of a MIR imaging system according to the invention. The imaging system 10 includes a quantum cascade laser 11 that generates a collimated beam 18 having a narrow band of wavelengths in the MIR. In one aspect of the invention, quantum cascade laser 11 is a quantum cascade laser with tunable wavelength and is controlled by controller 19 . The intensity of the light from quantum cascade laser 11 is controlled by variable attenuator 11 a which is also controlled by controller 19 . The collimated beam 18 is split into two beams by the partial mirror 12 . The light beam 18a is directed to a lens 15 which focuses the light beam onto a sample 16 mounted on an xyz stage 17 which positions the sample 16 relative to the focal point of the lens 15 . The light reflected from the sample 16 is collimated into a second beam having a diame...

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Abstract

An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.

Description

Background technique [0001] Quantum cascade lasers provide tunable mid-infrared (MIR) light sources that can be used for spectroscopic measurements and imaging. Many chemical compounds of interest have molecular vibrations excited in the MIR region of the spectrum at wavelengths spanning 5 to 25 microns. Thus, measuring the absorption of MIR light at different locations on the sample can provide useful information on the chemical properties of the sample as a function of location on the sample. [0002] One class of imaging spectrometers measures light reflected from a sample as a function of position on the sample and the wavelength of the illuminating MIR light. In many samples of interest, the range of reflectance observed for the sample presents challenges because the dynamic range of the detector is not sufficient to measure the reflected light with sufficient precision. Contents of the invention [0003] The invention includes an imaging scanner and a method of using...

Claims

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Application Information

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IPC IPC(8): G01J3/42G01J3/28G01J3/06G01J3/02
CPCG01J3/0208G01J3/0213G01J3/0224G01J3/06G01J3/2823G01J3/42G01J2003/064G01J3/28G01J3/45H04N5/33H04N23/741G01J3/108
Inventor 查尔斯·霍克克里斯托弗·瑞恩·穆恩安德鲁·杰特尔洋·韩
Owner AGILENT TECH INC
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