Method and apparatus for measuring parallelism of germanium window plate

A parallelism and window technology, applied in the field of optical detection, can solve the problems of inaccurate parallelism, inability to reflect the influence of germanium window height on parallelism, and expensive equipment.

Inactive Publication Date: 2017-03-22
FUJIAN CASTECH CRYSTALS
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Problems solved by technology

[0003] The germanium window is a parallel plane window element in front of the detector in the infrared thermal imaging system; it plays the role of passing through the infrared band (8~14μm) and sealing the Dewar bottle, so the parallelism requirements for high-precision germanium windows It is very high (θ≤10″), but because germanium windows cannot pass through visible light, conventional visible light interferometry cannot be used. At present, high-precision measurement can only be measured by X...

Method used

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  • Method and apparatus for measuring parallelism of germanium window plate

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Embodiment Construction

[0007] Glue the lower surface of the germanium window to be tested on a fused silica photoplastic plate with a flatness of 100nm so that the lower surface of the germanium window is completely parallel to the surface of the photoplastic plate, and adjust the inclination of the platform to make the surface of the photoplastic plate and the laser Vertical, that is, the reference plane receiving the reflected laser interferes with the surface of the photoresist to form interference fringes S1. At this time, the reference plane receiving the reflected laser also interferes with the upper surface of the germanium window to form interference fringes S2. After image comparison analysis S1 and S2 to obtain the maximum offset A, the distance between the reference plane receiving the reflected laser and the germanium window is L, according to the principle of optical reflection, the parallelism between the surface of the optical plastic plate and the upper surface of the germanium window ...

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Abstract

The invention provides a method and apparatus for measuring the parallelism of a germanium window plate. The apparatus comprises a helium-neon laser system, an inclination-adjustable platform and a reference plane for receiving the reflected laser and measurement and analysis software thereof. The method includes the steps of gluing the germanium window plate on a photoresist plate and placing on the platform, and adjusting the platform inclination so that the surface of the photoresist is perpendicular to the laser. The parallelism of the upper and lower surfaces of the germanium window is theta = arctan (A / L) / 2, wherein A is the laser reflection offset reflected by the upper surface of the germanium window plate, and L is the distance between the laser receiving plane and the germanium window plate. Visible laser is used to detect the parallelism of infrared germanium window plate. The apparatus has the advantages of relative simple structure and high measurement precision.

Description

technical field [0001] The invention belongs to the field of optical detection, in particular to a method and a device for measuring the parallelism of germanium windows. Background technique [0002] Light glue refers to the process of adhering two clean, smooth and consistent optical parts with a little pressure without any adhesive. After light glue, the two light glue surfaces are parallel to each other; It is a reference plate with high precision and used for photoresist products. [0003] The germanium window is a parallel plane window element in front of the detector in the infrared thermal imaging system; it plays the role of passing through the infrared band (8~14μm) and sealing the Dewar bottle, so the parallelism requirements for high-precision germanium windows It is very high (θ≤10″), but because germanium windows cannot pass through visible light, conventional visible light interferometry cannot be used. At present, high-precision measurement can only be measu...

Claims

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Application Information

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IPC IPC(8): G01B11/27
CPCG01B11/27
Inventor 肖忠杰罗兴木姜心声王昌运陈伟
Owner FUJIAN CASTECH CRYSTALS
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