Ultrasonic cleaning method and device
An ultrasonic cleaning and ultrasonic technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., can solve problems such as complex processes, high cleaning costs, and expensive equipment
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[0026] Below through the accompanying drawings and examples, the technical scheme of the present invention is described in further detail.
[0037] This step is used to detect whether the plate 200 to be cleaned is cleaned. The plate 200 to be cleaned can be detected by a microscope
[0040] Until step S140, it is detected that the plate 200 to be cleaned has been cleaned, and the execution of step S100-step S150 is terminated.
[0045]
[0046]
[0058] The controller 300 also includes: a liquid supplement controller 40 and a gas supplement controller 30; a liquid supplement controller 40 and a gas supplement controller 30
[0065] In the embodiment of the present invention, the frequency of the ultrasonic parameter controller is selected at 15kHz-5MHz.
[0068] Figure 3 is a spot cleaning. As shown in Figure 3(a), spot cleaning is the first cleaning method.
[0071] In this embodiment, the point cleaning is to clean the part of the plate 200 to be cleaned.
[0072] FIG. 4 is a ...
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