Magnetorheological Polishing Method for Deliquescent Crystals

Abstract

The invention discloses a magnetorheological polishing method for deliquescent crystals, comprising (1) preparing a non-water-based magnetorheological polishing liquid; (2) adding the non-water-based magnetorheological polishing liquid into the circulation system of a magnetorheological machine tool Carry out two magnetorheological polishing processes; (3) After the two magnetorheological polishing processes are completed, the obtained deliquescent crystals are quickly cleaned with aromatic hydrocarbons to complete the magnetorheological polishing process of the deliquescent crystals. The method of the invention has simple technological process and strong operability, and can process high-precision, ultra-smooth and deliquescent crystals that meet the requirements of high-, medium- and low-frequency bands of the crystal by a strong light optical system.

Description

technical field [0001] The invention relates to a magnetorheological polishing method, in particular to a magnetorheological polishing method for deliquescent crystals, which realizes the polishing process of deliquescent crystal components. Background technique [0002] Magneto-rheological polishing technology (MRF) is a new optical processing method, which uses the rheology of magnetorheological polishing fluid in a magnetic field to polish workpieces, and can achieve deterministic removal and sub-nanometer surface roughness. [0003] In the current magnetorheological polishing process, the processed materials are mainly optical materials such as fused quartz, ceramics and silicon carbide. , the material removal mainly relies on the polishing powder in the magnetorheological polishing fluid to shear and remove the material. However, for deliquescent crystals such as KDP crystal materials, it is not suitable to use this water-based magnetorheological polishing fluid for pr...

AI Technical Summary

Problems solved by technology

However, for deliquescent crystals such as KDP crystal materials, it is not suitable to use this water-based magnetorheological polishing fluid for processing: on the one hand, due to the soft texture (Mohs hardness of about 2.4), high brittleness, deliquescence and Easy thermal cracking and other characteristics, using the traditional magnetorheological polishing fluid to shear and remove, it is easy to produce obvious scratches on the crystal surface, carbonyl iron powder in the magnetorheological polishing fluid is easy to embed on the crystal surface and it is difficult to clean after embedding; On the one hand, the water in the magnetorheological polishing liquid is likely to cause crystal atomization. For deliquescent crystal materials, once the surface deliquescence occurs, the surface quality will be irreversibly damaged.

This series of problems makes the current magnetorheological polishing process unsuitable for processing deliquescent crystals such as KDP / DKDP crystals, and the current high-light optical system has an urgent demand for KDP crystal optical components with high surface accuracy. The optical system has extremely high requirements on the various indicators of the KDP crystal, including: aperture, surface shape accuracy, gradient error, PSD1, PSD2, and surface roughness. Due to various reasons, ultra-precision diamond cutting cannot process all these indicators. KDP crystal optical components, therefore, need to study new processing technology to solve these technical problems

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