Method for detecting low sub surface damages of rigid brittle optical material

Abstract

The invention relates to a method for detecting low sub surface damages of a rigid brittle optical material. The method is characterized by obtaining a Brewster angle of a to-be-detected sample through preparation of a tester and detection on sample surface damages and further utilizing the Brewster angle to represent the surface interface roughness of the sample, wherein the tester comprises a dial, an object stage, a laser, a first polarizing film, a light intensity meter and a second polarizing film. According to the method disclosed by the invention, the structure is simple, the cost is low, the size of the Brewster angle of light rays incident to the sample can be accurately measured by utilizing linearly polarized light, the Brewster angle is used for representing the surface interface roughness of the sample, the measurement deviation can be kept within one percent, and the accuracy of a detection result is high; the method for detecting the low sub surface damages of the rigid brittle optical material is simple and rapid, and the surface of the to-be-detected sample is not damaged; meanwhile, the method disclosed by the invention can also be used for measuring other micro surface structures of an optical element and is capable of achieving nano-scale surface micro structure detection, and a condition is provided for preparing a high-quality high-damage threshold thin film.

Description

technical field [0001] The invention relates to a low subsurface damage detection method for hard and brittle optical materials. Background technique [0002] High-quality hard and brittle material detection technology is a prerequisite for the preparation of high damage threshold films, and high damage threshold films have become one of the core issues in the development of high-power laser devices, and are the main bottleneck that restricts the development of laser systems in the direction of high energy and high power. . [0003] The surface and subsurface defects formed during the manufacturing process of hard and brittle optical materials will generate high temperature locally under certain energy laser irradiation, resulting in component damage. Therefore, it is of great practical significance and application prospect to study the detection technology of the subsurface of hard and brittle optical materials. The information contained in the scattered light of the opti...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a method for detecting low subsurface damage of hard and brittle optical materials by using linearly polarized light, which has not been reported in the prior art

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