Integrated bandpass filter, manufacturing method thereof and spectrometer

A band-pass filter and manufacturing method technology, applied in the field of optics, can solve the problems of bulky size, inability to meet the application requirements of miniaturization and speed, slow speed, etc., and achieve the effect of easy preparation, low cost and fast speed

Active Publication Date: 2017-02-22
YANGZHONG HENGHAI ELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current spectral analysis technology mainly relies on grating light splitting or multiple discrete bandpass filters for light splittin...

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  • Integrated bandpass filter, manufacturing method thereof and spectrometer
  • Integrated bandpass filter, manufacturing method thereof and spectrometer
  • Integrated bandpass filter, manufacturing method thereof and spectrometer

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Embodiment Construction

[0027] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the invention. The present invention may be practiced without some or all of these specific details. In other instances, well known process operations have not been described in detail in order not to unnecessarily obscure the present invention. While the invention will be described in conjunction with specific embodiments, it will be understood that they are not intended to limit the invention to those embodiments.

[0028] figure 1 It is a structural schematic diagram of the integrated bandpass filter of the present invention. like figure 1 As shown, the integrated bandpass filter of the present invention includes a metal layer or a layer 1 mainly of metal, in which a through micron or nanohole array is formed, i.e. metal micron or nanohole Array 2, the characteristic wavelength λ of the light passing through the metal micro or nano hole (metal hol...

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Abstract

The invention discloses an integrated bandpass filter, a manufacturing method thereof and a spectrometer. The integrated bandpass filter comprises a metal layer and a layer which is mainly made of metal. The metal layer is provided with a through micrometer or nanometer hole array. The characteristic wavelength lambda of light which penetrates through the metal micrometer or nanometer hole approximately satisfies a formula lambda approximately equals with nD, and hereon, n is the refraction coefficient of a filling material in the metal hole, and D is diameter or width of the metal hole. Each metal hole in the integrated bandpass filter is a bandpass filter. Through changing the size of the metal hole, a large number of miniature bandpass filters with different gating wavelengths are integrated on a small chip through a one-time machining method. Furthermore the process manufacturing method of the integrated bandpass filter is compatible with a CMOS process. Low cost is realized. Furthermore the metal hole, particularly the metal hole with a smooth inside wall and uniform hole diameter can be prepared in a relatively simple manner.

Description

technical field [0001] The invention relates to an optical field, in particular to an integrated bandpass filter, a manufacturing method thereof and a spectrometer. Background technique [0002] The spectrum of a substance contains a large amount of chemical information of the substance, and each substance has a corresponding characteristic spectrum. Therefore, the detection of the spectrum of a substance can analyze the chemical composition of the substance. and other fields have broad application prospects. However, the current spectral analysis technology mainly relies on grating light splitting or multiple discrete bandpass filters for light splitting. The former is bulky and slow, and cannot meet the application requirements of miniaturization and speed; while the latter can only detect Information. The present invention proposes to prepare vertical nano or micro cylinders and further form vertical metal holes. The research results show that the wavelengths transmitte...

Claims

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Application Information

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IPC IPC(8): G01J3/02G02B5/22
CPCG01J3/0205G02B5/22G01J3/02G02B5/20
Inventor 但亚平
Owner YANGZHONG HENGHAI ELECTRONICS TECH CO LTD
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