Tail-end pose detection system and method for flexible parallel platform with photoelectronic packaging

Abstract

The invention provides a tail-end pose detection system and method for a flexible parallel platform with photoelectronic packaging. The system is composed of a moving platform, a fixed platform, a moving platform connecting element, and five sets of pose detection units. The five sets of pose detection units are used for detecting and controlling pose values with six freedom degrees of the moving platform in real time. In addition, the method includes macroscopic pose detection and microcosmic pose detection. During the macroscopic pose detection, five laser displacement sensors detect the pose of the moving platform. The overall detection system has advantages of small size and low cost. The moving platform connecting element is arranged below the fixed platform without any contact, thereby avoiding any interference to the motion of the moving plane. Two laser displacement sensors are arranged outside the flexible parallel platform, thereby avoiding increasing of the pressure on the moving platform. Besides, during the microcosmic pose detection, adjusting is carried out by using an optical power meter and fine tuning is carried out based on the light transmitting value of the optical power meter.

Description

technical field [0001] The present invention relates to the technical field of flexible parallel platform detection, and more specifically, to a system and method for detecting the position and posture of the end of a flexible parallel platform for optoelectronic packaging. Background technique [0002] Optoelectronic packaging is the process of optically aligning and coupling optoelectronic devices with input and output array fibers. The motion platform for optoelectronic packaging needs to achieve six-degree-of-freedom motion and sub-micron positioning accuracy. The parallel motion platform has the advantages of strong bearing capacity, good rigidity, compact structure, good dynamics and good positioning ability, which can make up for the traditional The structural precision of the tandem motion platform is poor, the error is accumulated, and the backlash cannot be eliminated. [0003] The flexible parallel platform has the advantages of high precision and large stroke, a...

AI Technical Summary

Problems solved by technology

[0004] Since the control of the existing six-degree-of-freedom flexible parallel platform is to indirectly obtain the end pose of the flexible parallel platform by calculating the displacement of the grating ruler, it is impossible to directly detect the end pose of the flexible parallel platform, which affects the detection of the platform pose. with the effect of adjusting

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