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Vertically-discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof

A micro-gyroscope, distributed technology, used in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc. The effect of realizing full angle control and reducing parasitic capacitance

Active Publication Date: 2017-01-11
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the above-mentioned patents only provide the structural scheme of the miniature hemispherical gyroscope with internal discrete electrodes and external discrete electrodes, and cannot provide different electrode distribution schemes for various miniature gyroscopes.

Method used

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  • Vertically-discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof
  • Vertically-discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof
  • Vertically-discrete dual-electrode distributed micro-gyroscope and manufacturing method thereof

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Experimental program
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Effect test

Embodiment 1

[0047] Such as Figure 1(a)-Figure 1(c) As shown, the present embodiment provides a two-electrode distributed miniature disc resonator gyroscope with upper and lower separation, including:

[0048] A disk-shaped micro-resonator 1;

[0049] Sixteen evenly distributed upper electrodes 2;

[0050] Sixteen evenly distributed lower electrodes 3;

[0051] A monocrystalline silicon substrate 4;

[0052] a glass substrate 5;

[0053] A central fixed support column 6; wherein:

[0054] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a));

[0055] Sixteen uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. 1(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in FIG. c)); sixteen uniformly distributed lower electrodes 3 are ...

Embodiment 2

[0067] Such as Figure 2(a)-Figure 2(c) As shown, the present embodiment provides a two-electrode distributed micro-ring resonant gyroscope separated up and down, including:

[0068] A ring-shaped micro-resonator 1;

[0069] Sixteen evenly distributed upper electrodes 2;

[0070] Sixteen evenly distributed lower electrodes 3;

[0071] A monocrystalline silicon substrate 4;

[0072] a glass substrate 5;

[0073] A central fixed support column 6; wherein:

[0074] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 2(a)); 16 The uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 2(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 2(c) shown); sixteen uniformly distributed lower electrodes 3 are arranged o...

Embodiment 3

[0082] Such as Figure 3(a)-Figure 3(c) As shown, the present embodiment provides a dual-electrode distributed miniature multi-ring resonant gyroscope separated up and down, including:

[0083] A multi-ring micro-resonator 1;

[0084] Sixteen evenly distributed upper electrodes 2;

[0085] Sixteen evenly distributed lower electrodes 3;

[0086] A monocrystalline silicon substrate 4;

[0087] a glass substrate 5;

[0088] A central fixed support column 6; wherein:

[0089] One end of the central fixed support column 6 is connected to the monocrystalline silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in Figure 3(a)); 16 The uniformly distributed upper electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in Figure 3(b)), and are evenly distributed on the upper side of the micro-resonator 1 (as shown in Figure 3(c) shown); sixteen uniformly distributed lower electrodes 3 are ...

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Abstract

The invention provides a vertically-discrete dual-electrode distributed micro-gyroscope and a manufacturing method thereof. The micro-gyroscope comprises a monocrystalline silicon substrate, a central fixation supporting column, a micro harmonic oscillator, a plurality of upper electrodes, a plurality of lower electrodes and a glass substrate. The multiple upper electrodes are uniformly distributed on the upper side of the micro harmonic oscillator so that the uniformly-distributed upper electrodes can be formed; the multiple lower electrodes are uniformly distributed on the lower side of the micro harmonic oscillator so that the uniformly-distributed lower electrodes can be formed. Manufacturing is performed with the combination of MEMS bulk silicon machining and surface silicon machining technologies, different driving and detection modes and different working modes can be provided, and the micro-gyroscope can work in a system needing complex control; driving and detection can be performed by means of the lower electrodes and the upper electrodes respectively, the stray capacitance between the driving electrodes and the detection electrodes can be lowered, and the detection precision can be improved.

Description

technical field [0001] The invention relates to a micro gyroscope in the field of micro-electromechanical technology, in particular to a distributed micro gyroscope with upper and lower separate electrodes and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro-gyro is self-evident. In particular, the miniature disk resonant gyroscope, as an important research direction of the MEMS microgyroscope, has become a research hotsp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5684G01C19/5691
CPCG01C19/5684G01C19/5691
Inventor 张卫平欧彬刘朝阳唐健孙殿竣邢亚亮魏志方崔峰成宇翔赵万良刘瑞鑫
Owner SHANGHAI JIAO TONG UNIV
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