Active-passive combined vibration isolator based on positive-stiffness and negative-stiffness parallel connection

Abstract

The invention discloses an active-passive combined vibration isolator based on positive-stiffness and negative-stiffness parallel connection. The active-passive combined vibration isolator based on positive-stiffness and negative-stiffness parallel connection comprises a basic platform (10), a load-bearing platform (30), a passive vibration isolation unit and an active vibration isolation unit, wherein the passive vibration isolation unit is provided with a positive-stiffness air spring (20) and a magnetic negative-stiffness mechanism (28) with adjustable negative stiffness in the first direction, so that the inherent frequency in the first direction is decreased, and the passive vibration isolation unit is provided with a stiffness-adjustable positive-stiffness leaf spring and a negative-stiffness inverted pendulum in the second direction, so that the inherent frequency in the second direction is decreased; the active vibration isolation unit is arranged at the outer side of the passive vibration isolation unit, the upper end of the active vibration isolation unit is linked with the load-bearing platform (30), and the lower end of the active vibration isolation unit is linked with the basic platform (10); and the active vibration isolation unit comprises displacement sensors, speed sensors, a proportional pressure valve and a voice coil motor, and the voice coil motor is used for fine adjustment of the load-bearing platform, so that vibration is further isolated. The active-passive combined vibration isolator based on positive-stiffness and negative-stiffness parallel connection has high bearing capacity, and active and passive vibration isolation of two degrees of freedom is achieved at the same time.

Description

technical field [0001] The invention belongs to the field of ultra-precision vibration reduction, and in particular relates to a two-degree-of-freedom active-passive composite vibration isolator adopting positive and negative stiffness parallel connections. Background technique [0002] As the characteristic line width, which is a sign of the development of the IC manufacturing industry, continues to advance to newer process nodes, the accuracy of ultra-precision electronic manufacturing and measurement equipment is getting closer and closer to the limit, and the requirements for the structure and stability of key motion mechanisms are increasing. The higher the level, the more stringent the requirements for the stability of the environment. In the traditional manufacturing field, the influence of weak disturbances, non-linear errors of measurement and dynamic characteristics on the accuracy of the entire system is becoming more and more prominent. Therefore, vibration isolat...

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Problems solved by technology

However, it cannot achieve the static bearing capacity of large loads. At the same time, it is designed in a single-degree-of-freedom direction, and there are still certain deficiencies in occasions where the demand for bearing capacity is large and the degree of freedom is required.

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