Optical detection method and optical detection system for particle morphology

Abstract

The present invention discloses an optical detection method and an optical detection system for particle morphology. The method comprises: dispersing particle samples, obtaining the position information of the particles in a three-dimensional space by combining a low coherence interferometry measurement method and a microscopic imaging method, and extracting the morphological information of the analyzed particle, wherein the distribution positions of the dispersed particles along the optical axis direction are determined by using the low coherence interferometry measurement method, and the distribution positions of the dispersed particles in the plane perpendicular to the optical axis are obtained by using the microscopic imaging method. The system comprises a particle dispersing device, a low-coherence interferometry and microscopic imaging combined imaging measurement device, and a processor. According to the present invention, the operation is simple and effective, the distribution position information of the particles in the three-dimensional space can be provided, the overlapping effect of the particles with different depths in the two-dimensional image based on the image microscopic particle size measurement can be avoided, the particle measurement error is substantially reduced, and the method and the system can be used for the high precision particle morphology measurement in industrial production and scientific research.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and in particular relates to an optical detection method and system for particle morphology combined with low-coherence interferometry and microscopic imaging technology, which can be used to test particles in industrial production and obtain particle shape information. technical background [0002] All kinds of particles are ubiquitous in the natural environment, industrial and agricultural production, and human daily life. These fine dispersed substances exist in the form of solid, gas and liquid, such as dust and water droplets in the air, sand on the beach, smoke in the gas emitted by factories, etc. The understanding and research on granules has gradually penetrated into many fields such as chemical industry, smelting, and pharmaceuticals. The particle size and shape of the particles are closely related to the performance and quality of the product. For example, in the technolo...

AI Technical Summary

Problems solved by technology

However, microscopic imaging can only observe the particle projection image of the two-dimensional plane, and its depth cannot be characterized, so it is impossible to obtain the particle size and distribution information in the depth direction of the particle sample

Particles in space will overlap on the two-dimensional projection surface, which will affect the accuracy of measurement

Images