High-precision, wide-range and large-work-distance auto-collimation device and method thereof

Abstract

The invention belongs to the precision measurement technology field and the optical engineering field and especially relates to a high-precision, wide-range and large-work-distance auto-collimation device and a method thereof. The device is formed by a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. In the method, through adjusting the reflecting mirror, a reflected light beam is returned to a feedback imaging system image plane center; and through using an angle deflection measurement apparatus on the reflecting mirror, an angle change of a measured object surface is acquired. Because the reflecting mirror is added on a traditional auto-collimation angle measurement system, a problem that measured object reflection light deviates the measurement system so that measurement can not be performed can be avoided. Under a same work distance, an auto-collimation work range is increased, or under the same work range, the work distance is increased. Besides, because of specific designs of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the structure is simple and manufacturing cost is low; under a low sampling frequency, measured precision is high and rapid measurement can be reached.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and specifically relates to an autocollimation device and method with high precision, wide range and large working distance. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hun...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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