A multi-dimensional variable parameter vibration mechanical polishing device and its fuzzy pid control method
A technology of mechanical polishing and variable parameters, which is applied in the direction of electric controllers, grinding/polishing equipment, controllers with specific characteristics, etc., and can solve problems such as low processing efficiency and manufacturing precision, inability to adjust vibration frequency, and limited scope of application. , to achieve the effect of uniformity removal, elimination of kinematic coupling, and improvement of processing quality
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[0124] According to the actually generated trajectory of the polishing head and the actual processing surface roughness requirements, determine the required three-dimensional vibration parameters: including the size of the major and minor axes of the ellipse, the orientation of the ellipse plane, the frequency of the ellipse motion, etc., according to the formula (1)- (3) Generate ideal displacements of the motion track in the X-axis, Y-axis and Z-axis directions, and output drive voltage signals in the X-axis, Y-axis and Z-axis directions.
[0125] Apply u to the X-axis piezoelectric stack, Y-axis piezoelectric stack and Z-axis piezoelectric stack respectively x (t), u y (t), u z (t) drive signal, Figure 6-9 Its three-dimensional, xoy, xoz and yoz plane motion trajectories are shown respectively.
[0126] u x (t)=30sin(wt+π / 6) (22)
[0127] u y (t)=50sin(wt+5π / 6) (23)
[0128] u z (t)=60sin(wt+2π / 6) (24)
[0129] The displacement sensor measures the actual displacem...
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