Meter-stage large-opening-diameter optical element CO2 laser polishing device and polishing method
A technology of optical components and laser polishing, which is applied in laser welding equipment, metal processing equipment, welding equipment, etc., can solve the problems of easily induced defects, impurity infiltration, and long time consumption, so as to reduce the difficulty of parameter adjustment, improve the repair effect, and prevent The effect of unstable quality
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[0032] CO for meter-scale large-aperture optical components 2 Laser polished, the base material is round fused silica glass. The experiment was carried out in a class 10,000 clean room. First, the optical components are cleaned and dried for pretreatment. Then the optical element 3 is fixed on the workbench 1 by the electromagnetic clamp 2, and the optical element 3 faces the laser beam. Adjust laser parameters: laser power 60W, repetition rate 1kHz, pulse width 10μs, focal length 20mm, spot diameter 2mm, galvanometer scanning speed 100mm / s, track interval 1mm, track exceeding fused silica size 1%. The rotating speed of workbench 1 is 1rad / s, the speed of feeding mechanism is 5mm / s, and the image 3 Scanning in a spiral trajectory. After scanning the entire surface of the optical element, reduce the laser power by 5-10W each time, reduce the speed of the feed mechanism by 5-10mm / s, keep the other parameters unchanged, and repeat the scanning for many times until the surfac...
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