An array zero-setting laser large working distance auto-collimation device and method

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to an array zero-setting laser large working distance auto-collimation device and method. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system. In the method, by adjusting the reflector, a reflected beam is returned to the center of an image plane of the feedback imaging system, and then an angular deflection measuring device on the reflector is used to obtain angle changes of the surface of a measured object. In the invention, since the reflector is added to the conventional auto-collimating angle measuring system, it is possible to avoid the problem that measuring can not be carried out since reflected light of the measured object deviates from the measuring system, so that the advantage of increasing the auto-collimation range at the same working distance or increasing the working distance in same auto-collimation range are realized. In addition, the specific design of the collimating mirror, the feedback imaging system, the reflector and the like make the device of the invention simple in structure, low in production cost, and capable of performing measurement in an unstable measurement environment; and a technical advantage of rapid measurement is realized.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to an array zeroing laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resoluti...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Images