A three-degree-of-freedom piezoelectric-driven micro-nano positioning platform

Abstract

The invention relates to a three degree-of-freedom piezoelectric driving micro-nano locating platform. The locating platform mainly comprises a z-direction motion platform assembled in a switching base driven by an X-direction motion platform and a Y-direction motion platform. The X-direction motion platform and the Y-direction motion platform are assembled in a bottom base through an X-direction compound bridge type displacement magnifying mechanism, a Y-direction compound bridge type displacement magnifying mechanism and a semicircle hinge branch decoupling mechanism. Grating rulers examining X-direction motion and Y-direction motion of the X-direction motion platform and the Y-direction motion platform are installed on the X-direction motion platform and the Y-direction motion platform correspondingly. The grating rulers are matched with grating ruler reading heads detecting the X direction and the Y direction correspondingly to together complete detection and feedback of motion of two freedom degrees of the micro-nano locating platform. Piezoelectric ceramic actuators are arranged in both the X-direction compound bridge type displacement magnifying mechanism and the Y-direction compound bridge type displacement magnifying mechanism to drive the X-direction motion platform and a Y-direction motion platform to move. The locating platform is based on piezoelectric ceramic driving and has the X freedom degree, the Y freedom degree and the Z freedom degree, and translational motion in the three independent directions can be achieved.

Description

technical field [0001] The invention relates to a three-degree-of-freedom piezoelectric-driven micro-nano positioning platform. The positioning platform is driven by piezoelectric ceramics and has three degrees of freedom of XYZ, which can realize translational motion in three independent directions, and can be used for scanning motion of scanning probe microscope, precise optical trajectory tracking detection, spatial positioning of micro-nano manufacturing and assembly . Background technique [0002] Micro-nano positioning technology is a key technology in modern high-tech and modern industry, and has a wide range of applications in many fields such as precision manufacturing, ultra-precision measurement and micro-manipulation. The precision micro-nano positioning platform is a key part of micro-nano positioning technology. It has broad application prospects and important research value in the fields of assembly of micro-mechanical parts, bioengineering, scanning probe mi...

AI Technical Summary

Problems solved by technology

[0005] At present, most precision micro-nano motion positioning platforms are flexible motion mechanisms driven by piezoelectric ceramics. Many motion platforms are directly driven by piezoelectric ceramics. However, due to the limitation of the travel range of piezoelectric actuators, the output displacement of the platform cannot reach enough working space. Requirements; In addition, the micro-nano positioning platform studied is mainly a one-dimensional or two-dimensional planar motion platform, which cannot meet the multi-degree-of-freedom work requirements in complex situations

[0006] The few three-dimensional micro-nano platforms studied have many parts, and each part is processed independently, which leads to large errors in the assembly process. After the displacement amplification by the amplification mechanism, the positioning accuracy obviously cannot meet the requirements

[0007] The micro-nano motion positioning platform has different structural dimensions and parameter requirements for different working environments. At present, some platforms have encountered problems such as complex structure, large size range, and difficult analysis and modeling in order to realize their functional requirements, making their operation and control complicated.

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