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A portable laser large working distance autocollimation device and method

A working distance and portable technology, applied in the field of portable laser self-collimation device with large working distance, can solve the problems of inability to realize self-collimation and micro-angle measurement, the range cannot be too large, the reflected beam deviates from the entrance pupil, etc. Difficulty, large area, effect of increasing working distance

Active Publication Date: 2018-08-24
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement
[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Method used

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  • A portable laser large working distance autocollimation device and method
  • A portable laser large working distance autocollimation device and method
  • A portable laser large working distance autocollimation device and method

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specific Embodiment 1

[0075] This embodiment is an embodiment of a portable laser autocollimation device with a large working distance.

[0076] The structure diagram of the portable laser large working distance self-collimation device in this embodiment is as follows figure 2 shown. The self-collimation device includes a light source 1, a reflective collimator 22, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted by the light source 1 passes through a reflective collimator After the straight mirror 22 is collimated into a parallel light beam, it is reflected by the mirror 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the mirror 3 and collected by the feedback imaging system 6 imaging;

[0077] The feedback imaging system 6 is arranged between the light source 1 and the reflective collimator 22, and include...

specific Embodiment 2

[0080] This embodiment is an embodiment of a portable laser autocollimation device with a large working distance.

[0081] The structure diagram of the portable laser large working distance self-collimation device in this embodiment is as follows Figure 7 shown. On the basis of the specific embodiment 1, the portable laser autocollimation device with large working distance in this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0082] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

[0083] T...

specific Embodiment 3

[0084] This embodiment is an embodiment of a portable laser autocollimation device with a large working distance.

[0085] The structure diagram of the portable laser large working distance self-collimation device in this embodiment is as follows Figure 8 shown. On the basis of the specific embodiment 1, the portable laser autocollimation device with large working distance in this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0086] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3; ...

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Abstract

The invention belongs to the fields of a precision measurement technology and optical engineering and relates to a portable laser large-working distance auto-collimation device and method. The device comprises a light source, a collimating mirror, a reflector and a feedback imaging system. The method utilizes reflector adjustment to return reflected light to the image plane center of the feedback imaging system and utilizes an angle deflection measurement device on the reflector to acquire angle change of the surface of an object to be detected. The reflector is used based on the traditional auto-collimation angle measurement system so that measurement failure caused by detected object reflected light deviation from a measurement system is avoided and thus an auto-collimation work range is widened under the same work distance or a work distance is increased in the same auto-collimation work range. Through the collimating mirror, the feedback imaging system and the reflector, the portable laser large-working distance auto-collimation device has a small volume and a high measurement precision, is portable and realizes measurement in an unstable measurement environment and fast measurement.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and in particular relates to a portable laser self-collimation device and method with large working distance. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C15/00
CPCG01C15/004
Inventor 谭欣然朱凡王超谭久彬
Owner HARBIN INST OF TECH
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