A kind of preparation method of composite anti-reflection film crystalline silicon solar cell

Abstract

The invention discloses a preparation method of a composite anti-reflection membrane crystalline silicon solar battery, and belongs to the technical field of a solar battery. The method specifically comprises the following steps: S1, texturing; S2, preparing a p-n junction through thermal diffusion; S3, removing PSG; S4, preparing a hydrogenated amorphous silicon layer; S5, placing a mask layer on the amorphous silicon layer, a mask figure covering a part of the hydrogenated amorphous silicon layer, then depositing silicon nitride to form a porous silicon nitride layer, and the hydrogenated amorphous silicon layer and the porous silicon nitride layer cooperating to form a composite anti-reflection membrane; and S6, printing and sintering an Ag back electrode, an Al back electric field and an Ag positive electrode. According to the invention, by use of an excellent passivation effect of the amorphous silicon layer, low reflectivity of the porous silicon nitride layer and excellent optical matching of the amorphous silicon layer / the porous silicon nitride layer, the utilization rate of solar photons of the solar battery is greatly improved, the composite rate of charge carriers is greatly reduced, and the conversion efficiency of the battery is greatly improved.

Description

technical field [0001] The invention relates to a method for preparing a solar cell, in particular to a method for preparing a composite antireflection film crystalline silicon solar cell, and belongs to the technical field of solar cells. Background technique [0002] There are two development directions for crystalline silicon solar cells: one is to reduce manufacturing costs, such as increasing the output per unit time, reducing the consumption of consumables, and reducing labor costs, etc.; the other is to improve conversion efficiency and prepare solar cells with high conversion efficiency. There are two directions for improving the efficiency of crystalline silicon solar cells: one is to reduce the reflectivity, improve the utilization rate of solar photons, and reduce the waste of solar photons; the other is to reduce the recombination rate of carriers and improve the electron collection ability. In terms of improving the utilization rate of solar photons, RIE black s...

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Problems solved by technology

[0003] However, the above-mentioned solutions to improve conversion efficiency are costly and cumbersome, and it is difficult for the same technology to take into account the two advantages of improving the utilization rate of solar photons and reducing the recombination rate of carriers, and there is limited room for efficiency improvement.

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