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Precision piezoelectric stick-slip linear motor with asymmetric structure and its driving method

An asymmetric structure, linear motor technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problem of sawtooth-like unstable motion output, friction synthesis Problems such as difficult regulation and limited output mechanical performance can achieve the effect of improving mechanical output characteristics, reducing displacement retraction rate, and improving output efficiency

Active Publication Date: 2017-10-27
CHANGCHUN UNIV OF TECH
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  • Summary
  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation of the friction force between the stator and the mover, the limited output mechanical performance, the generation of sawtooth-like unstable motion output, and the degradation of output performance, the present invention discloses An asymmetric structure precision piezoelectric stick-slip linear motor and its driving method

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  • Precision piezoelectric stick-slip linear motor with asymmetric structure and its driving method
  • Precision piezoelectric stick-slip linear motor with asymmetric structure and its driving method
  • Precision piezoelectric stick-slip linear motor with asymmetric structure and its driving method

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specific Embodiment approach 1

[0023] Specific implementation mode one: combine Figure 1~Figure 8 This embodiment will be described. This implementation mode provides a specific implementation scheme of a precision piezoelectric stick-slip linear motor with an asymmetric structure. The asymmetric structure precision piezoelectric stick-slip linear motor is composed of a fixed bracket 1 , a loading mechanism 2 , a stator 3 and a mover 4 .

[0024] The fixed bracket 1 adopts an "L"-shaped structure, and the fixed bracket 1 can be made of stainless steel. The fixed bracket 1 includes a fixed bracket mounting hole 1-1, a loading mechanism threaded mounting hole 1-2, and a guide rail mounting plane 1 -3 and rail threaded mounting holes 1-4. The mounting hole 1-1 of the fixing bracket can be fixed with other platform devices, the threaded mounting hole 1-2 of the loading mechanism is used for fixing the loading mechanism 2, the mounting plane 1-3 of the guide rail and the threaded mounting hole 1-3 of the guid...

specific Embodiment approach 2

[0028] Specific implementation mode two: combination Figure 9 The figures illustrate the present embodiment. This embodiment provides a specific embodiment of a driving method for a precision piezoelectric stick-slip linear motor with an asymmetric structure. The driving method of the precision piezoelectric stick-slip linear motor with an asymmetric structure is as follows.

[0029] The composite excitation electric signal used in the driving method is compositely superimposed on the sawtooth wave in the rapid deformation stage of the stator by the friction regulation wave, the driving wave is a sawtooth wave, and the friction regulation wave can be a sine wave. Among them, the period of the sawtooth wave is T1, and the amplitude of the excitation voltage is V 1 , the symmetry is D, and the period of the friction control wave is T 2 , the excitation voltage amplitude is V 2 , the period ratio of the sawtooth wave to the friction control wave is T 1 / T 2 =10~100000, the...

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Abstract

The invention provides a precise piezoelectric stick-slip linear motor with an asymmetric structure and a driving method thereof, and aims at solving the problem that mechanical output characteristics of an existing piezoelectric stick-slip linear motor are limited due to the fact that comprehensive regulation of friction is difficult and other problems. The precise piezoelectric stick-slip linear motor is composed of a fixed support, a loading mechanism, a stator and a rotor, and lateral displacement of the stator is produced by means of an asymmetric flexible hinge structure, so that friction driving force is increased, and friction resistance is reduced; meanwhile, a friction regulation wave is complexly superimposed in a sawtooth driving wave in the rapid deformation stage of the stator, therefore, the friction resistance between the stator and the rotor in the rapid deformation stage is reduced, comprehensive regulation of the friction is achieved, and the mechanical output characteristics of the piezoelectric stick-slip linear motor are significantly improved. The precise piezoelectric stick-slip linear motor with the asymmetric structure has the advantages of being simple in structure, high in precision, large in stroke and the like and has good application prospects in the fields of micro-nano precision driving and positioning of aerospace, optical precision instruments, semiconductor machining and the like.

Description

technical field [0001] The invention relates to a precision piezoelectric stick-slip linear motor with an asymmetric structure and a driving method thereof, belonging to the technical field of micro-nano precision driving and positioning. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of piezoelectric stick-slip linear motor that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-vibration under the excitation of an asymmetric electrical signal, and realizes mechanical energy output through the frictional coupling between the vibrator and the mover. precision micro-nano actuators. According to different driving working principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared with the resonant...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/02H02N2/04H02N2/06
CPCH02N2/02H02N2/04H02N2/06
Inventor 程廷海何猛张邦成卢晓晖何璞殷梦飞
Owner CHANGCHUN UNIV OF TECH
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