Joint inversion method for metal terahertz-far infrared complex refractive indexes
A complex refractive index and far-infrared technology, which is applied in the measurement of phase influence characteristics, material analysis through optical means, instruments, etc., can solve the problems of limited measurement frequency points and poor stability, and achieve poor stability, high reliability, Inverts the effect of a wide spectral range
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[0021] Attached below Figure 1-Figure 6 The present invention will be described in detail with specific embodiments.
[0022] The invention is a method for joint inversion of metal complex refractive index by using far-infrared ellipsometer and terahertz-far-infrared reflectance spectrum, which is divided into two parts: measurement and theoretical inversion. First, far-infrared ellipsometer and Fourier spectrometer are used to measure the exact solution of the complex refractive index in the far-infrared and the reflectance spectrum in the terahertz-far-infrared frequency band on the polished metal sample; then the theoretical inversion is carried out, and the inversion process It is: combined with the KK relationship between the amplitude and phase of the reflection coefficient, intercept the measured value of the ellipsometer near the high-frequency end of the terahertz as the initial value of the experiment, and adjust the exponential extrapolation parameters at the high-...
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