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Structure stability determining method and system for polymeric ComplexingAgent

A surfactant and structural stability technology, applied in the field of structural stability judgment of polymer surfactants, can solve the problems of long research and development cycle and high cost

Active Publication Date: 2016-07-27
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method has a long development cycle and high cost

Method used

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  • Structure stability determining method and system for polymeric ComplexingAgent
  • Structure stability determining method and system for polymeric ComplexingAgent
  • Structure stability determining method and system for polymeric ComplexingAgent

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0080] This embodiment provides a method for judging the structural stability of polymeric surfactants, comprising the following steps:

[0081] Step S0: Determine the molecular configuration, molecular weight and multiple preset temperatures of the surfactant.

[0082] This step is mainly used to determine the molecular configuration of the polymer surfactant and the molecular weight of the surfactant. CAs with different molecular weights have different microstructures. Moreover, at different temperatures, the structure of the surfactant will also be different

[0083] Step S1: For each preset temperature, perform the following steps respectively until the X-ray scattering intensities corresponding to the multiple different preset temperatures are obtained.

[0084] By calculating the X-ray scattering intensities at different preset temperatures, the structural changes of the polymeric surfactants at different temperatures can be compared, thereby determining the structural...

Embodiment 2

[0123] Compared with the previous embodiment, this embodiment regards the establishment of the reference action point model of the surfactant CA in step S112 as an independent step, and the specific step 1 is divided into the following steps:

[0124] Step S120: Obtain the molecular configuration, molecular weight and preset temperature of the surfactant CA.

[0125] Step S121: According to the molecular configuration and molecular weight of the surfactant, establish a reference action point model of the surfactant CA.

[0126] Step S122: Calculate and obtain the expression of the intramolecular correlation function of the surfactant CA.

[0127] In this step, calculation is performed directly according to the model parameters in step 121 to obtain the expression of the intramolecular correlation function of the surfactant CA.

[0128] Step S123: using PY approximation to establish a closed equation including the direct correlation function and the total correlation function ...

Embodiment 3

[0151] Corresponding to the above-mentioned embodiments, this embodiment provides a system for judging the structural stability of polymer surfactants, combining image 3 It can be seen that the system described in this embodiment specifically includes:

[0152] The acquisition module is used to acquire the molecular configuration, molecular weight and multiple different preset temperatures of the surfactant;

[0153] Specifically, the acquisition module includes:

[0154] The structure acquisition unit is used to determine the molecular configuration and molecular weight of the surfactant;

[0155] By obtaining the molecular configuration and molecular weight, the molecular chain structure of the surfactant is determined.

[0156] The temperature acquisition unit is used to determine the preset temperature of the surfactant.

[0157]The control module is used to control the corresponding module to perform calculation operations for each preset temperature until the X-ray s...

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Abstract

The present invention provides a structure stability determining method for a polymeric CA (ComplexingAgent). The method comprises: acquiring a molecular configuration, a molecular weight and multiple different preset temperatures of a target CA; obtaining an expression of an intra-molecular correlation function of the target CA by means of calculation; by use of PY (Percus-Yevick) approximation, establishing a closed equation that contains a direct correlation function and a total correlation function of the target CA; establishing a PRISM integral equation that contains the direct correlation function, the total correlation function and the intra-molecular function of the target CA; calculating the closed equation and the PRISM integral equation, so as to obtain an expression of the direct correlation function and an expression of the total correlation function, which correspond to the preset temperatures; carrying out calculation to obtain an X- light scattering intensity, which corresponds to a preset temperature, of the target CA; and according to X-light scattering intensities corresponding to the multiple different preset temperatures, determining structure stability of the target CA.

Description

technical field [0001] The invention relates to the technical field of chemical mechanical grinding technology and measurement, in particular to a method and system for judging the structural stability of polymer surfactants. Background technique [0002] In the chemical mechanical planarization (CMP) process of integrated circuits, the surfactant (Complexing Agent, CA), as the main component of the polishing liquid, plays an important role in the planarization of the chip surface. [0003] During the CMP process, CA can reduce the surface tension between the polishing liquid and the hydrophobic film, make the polishing liquid and the hydrophobic film more tightly bonded, reduce and control the residues and abrasive particles on the surface of the hydrophobic film of the wafer and other defects, Improve the effect of chemical mechanical grinding; and, CA also has a lower critical micelle concentration, which can easily disperse the grinding particles, stabilize the grinding ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F19/00
CPCG16C10/00
Inventor 徐勤志陈岚
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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